PRINTING PERIODIC PATTERNS USING MULTIPLE LASERS

WIPO Patent Application WO/2012/164539

A4

A method for printing a periodic pattern (19) of features into a photosensitive layer (21), which method includes providing a mask (18) bearing a mask pattern, providing a substrate (20) bearing the layer, arranging the substrate parallel to the mask, providing a number of lasers (1) having a plurality of peak wavelengths, forming from said light a beam for illuminating the mask with a spectral distribution of exposure dose and a degree of collimation, illuminating the mask with said beam such that the light of each wavelength transmitted by the mask pattern forms a range of transversal intensity distributions between Talbot planes and exposes the photosensitive layer to an image component, wherein the separation and spectral distribution are arranged so that the superposition of said components is equivalent to an average of the range of transversal intensity distributions formed by light of one wavelength and the collimation is arranged so that the features are resolved.

JPH0244358	PATTERN FORMING MATERIAL AND PATTERN FORMING METHOD
JP2002162752	IMAGE FORMING METHOD AND PHOTOSENSITIVE ELEMENT USED FOR THE METHOD
JP2004061238	WAVE FRONT ABERRATION MEASURING METHOD, WAVE FRONT ABERRATION MEASURING DEVICE, MANUFACTURING METHOD OF IMAGING OPTICAL SYSTEM AND MANUFACTURING METHOD OF EXPOSURE DEVICE

SOLAK HARUN (CH)
CLUBE FRANCIS (CH)
DAIS CHRISTIAN (CH)

PCT/IB2012/052778

January 24, 2013

June 01, 2012

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EULITHA A G (CH)
SOLAK HARUN (CH)
CLUBE FRANCIS (CH)
DAIS CHRISTIAN (CH)

G03F7/20

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