Title:
PROBE APPARATUS FOR KELVIN TEST
Document Type and Number:
WIPO Patent Application WO/2015/020353
Kind Code:
A1
Abstract:
The present invention provides a probe apparatus for a Kelvin test which contacts terminals of a device. The probe apparatus comprises: a contact layer which has conductivity and is stacked at the lowermost end thereof; an interposer layer which has a plurality of openings formed therein and is stacked on the contact layer; first probes inserted into the openings formed in the interposer layer to contact the contact layer at one ends thereof; second probes, each having one end located on and in contact with the upper portion of the interposer layer; and a load board for contacting the other ends of the probes and fixing the probes. Therefore, the interposer layer can short-circuit the probes, thereby providing an effect of conducting a Kelvin test even with a degree of integration lower than widths of terminals of a device.
Inventors:
CHOI JONG KOOK (KR)
SEO JEONG YUN (KR)
SEO JEONG YUN (KR)
Application Number:
PCT/KR2014/007062
Publication Date:
February 12, 2015
Filing Date:
July 31, 2014
Export Citation:
Assignee:
QUALMAX TESTECH INC (KR)
International Classes:
G01R1/06; G01R31/26; H01L21/66
Foreign References:
| KR20010030144A | 2001-04-16 | |||
| KR20040004878A | 2004-01-16 | |||
| KR20050066853A | 2005-06-30 | |||
| KR20060111392A | 2006-10-27 |
Attorney, Agent or Firm:
CHOI, KYU PAL (KR)
최규팔 (KR)
최규팔 (KR)
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