Title:
PROBE ASSEMBLY AND MICRO VACUUM PROBE STATION COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2020/226194
Kind Code:
A1
Abstract:
A probe assembly and a micro vacuum probe station comprising same are disclosed. A probe assembly according to one embodiment may comprise: a base; a guide rail installed on the base; a guide member sliding along the guide rail; a probe connected to the guide member and of which one side contacts a wafer to inspect electrical properties of the wafer; and a thin film connector connected to the other side of the probe so as to supply electricity to the probe.
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Inventors:
MOOM HAKBEOM (KR)
JANG YUNHYEONG (KR)
SEONG JISU (KR)
KIM NAKYEONG (KR)
JANG YUNHYEONG (KR)
SEONG JISU (KR)
KIM NAKYEONG (KR)
Application Number:
PCT/KR2019/005410
Publication Date:
November 12, 2020
Filing Date:
May 07, 2019
Export Citation:
Assignee:
NEXTRON CORP (KR)
International Classes:
G01R1/067; G01R31/28
Foreign References:
KR101724954B1 | 2017-04-07 | |||
KR20090125509A | 2009-12-07 | |||
JP2000150595A | 2000-05-30 | |||
KR20090046086A | 2009-05-11 | |||
KR20100057118A | 2010-05-31 |
Other References:
See also references of EP 3968031A4
Attorney, Agent or Firm:
MUHANN PATENT & LAW FIRM (KR)
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