PROBE CARD AND CONTACT INSPECTION DEVICE

Title:

PROBE CARD AND CONTACT INSPECTION DEVICE

Document Type and Number:

WIPO Patent Application WO/2017/069028

Kind Code:

A1

Abstract:

In order to reduce the risk of a drop in the spring property of a probe and improve inspection accuracy in energization inspection by inhibiting an excessive temperature rise of the probe when a high current is impressed during the performance of an energization inspection, the probe card (11) according to the present invention comprises a probe (3) having a spring property and a probe head (15) that holds the probe (3), wherein the probe head (15) has a guide unit (27) that holds the probe (3) so as to be movable in the axial direction (Z), and the guide unit (27) is provided with intermediate guides (57A, 57B, 57C) as a heat radiation structure (29) that absorbs heat of the probe (3) generated by energization and passes the heat to outside the probe (3).

Inventors:

YOSHIOKA TETSUYA (JP)
KAWANO TAKASHI (JP)
MAKISE SHIGEKI (JP)
NASU MIKA (JP)

Application Number:

PCT/JP2016/080301

Publication Date:

April 27, 2017

Filing Date:

October 13, 2016

Export Citation:

Click for automatic bibliography generation Help

Assignee:

NIHON MICRONICS KK (JP)

International Classes:

G01R1/073; G01R1/067

Domestic Patent References:

WO2013051675A1	2013-04-11
WO2014021194A1	2014-02-06
WO2011115082A1	2011-09-22
WO2013051099A1	2013-04-11

Foreign References:

JP2014181910A	2014-09-29
JP2009230897A	2009-10-08
JP2007012475A	2007-01-18
JPH06163657A	1994-06-10
JP2003215163A	2003-07-30

Other References: