Title:
PROBE CARD AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2018/025683
Kind Code:
A1
Abstract:
A probe card (100) according to the present invention inspects a work (50) that has a plurality of pads (51). The probe card (100) is provided with: a planar secondary battery (10) that comprises a planar electrode (22) and is arranged such that the planar electrode (22) faces the work (50); and an electrical connector (30) that is arranged between the work (50) and the secondary battery (10). The secondary battery (10) has a structure wherein a wiring line is able to be led out from the planar electrode (22) at an arbitrary position. The electrical connector (30) has a plurality of contacts (31) which protrude toward the facing pads (51); and the plurality of pads (51) and the planar electrode (22) are electrically connected to each other via the plurality of contacts (31).
Inventors:
KIKUTA MAKOTO (JP)
ANDO HIDENORI (JP)
ANDO HIDENORI (JP)
Application Number:
PCT/JP2017/026606
Publication Date:
February 08, 2018
Filing Date:
July 24, 2017
Export Citation:
Assignee:
NIHON MICRONICS KK (JP)
International Classes:
G01R1/073; G01R31/26; H01L21/66
Foreign References:
| JP2009081140A | 2009-04-16 | |||
| JP2007024555A | 2007-02-01 | |||
| JP2015014556A | 2015-01-22 | |||
| JPH10319038A | 1998-12-04 | |||
| US20130099812A1 | 2013-04-25 |
Other References:
See also references of EP 3495828A4
Attorney, Agent or Firm:
IEIRI Takeshi (JP)
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