PROBE CARD AND MANUFACTURING METHOD THEREFOR

WIPO Patent Application WO/2012/011628

A1

The present invention relates to a probe card and a method therefor, the probe card including: a space transformer that is electrically connected to a printed circuit board; and a probe mounted on the space transformer and contacted with a wafer, wherein the space transformer comprises: a common substrate on which a conductive metallic base contact is formed in a preset pattern; a conductive metallic upper plating layer which is formed in an MEMS scheme on an upper surface of the common substrate and is electrically connected with the base contact; an upper insulating layer, made of PI material, which is formed in the MEMS scheme on the upper surface of the common substrate; and a conductive metallic upper contact which is formed in the MEMS scheme in the inside of the upper insulating layer, and is electrically connected to the upper plating layer.

CHO, Byung Ho (8 Byucksan Garden Ville, 90-16 Jung-dong, Giheung-gu, Yongin-si, Gyeonggi-do 449-916, 449-916, KR)
조병호 (경기도 용인시 기흥구 중동 90-16 벽산가든빌 8호, 449-916 Gyeonggi-do, 449-916, KR)
CHO, Yong Ho (1003-203, Hyundai I-Park 10-Danji, Manhyeon Maeul, #857 Sanghyeon-dong, Suji-gu, Yongin-si, Gyeonggi-do 448-130, 448-130, KR)

KR2010/005904

January 26, 2012

September 01, 2010

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MICROFRIEND INC. (10f Seoul Technopark #172, Gongneung-dong Nowon-gu, Seoul 139-240, 139-240, KR)
(주) 마이크로프랜드 (서울특별시 노원구 공릉동 172 서울테크노파크 10층, 139-240 Seoul, 139-240, KR)
CHO, Byung Ho (8 Byucksan Garden Ville, 90-16 Jung-dong, Giheung-gu, Yongin-si, Gyeonggi-do 449-916, 449-916, KR)
조병호 (경기도 용인시 기흥구 중동 90-16 벽산가든빌 8호, 449-916 Gyeonggi-do, 449-916, KR)

H01L21/66

KIM, Won-Sik (4fl. Garion Bldg, 895-1 Daechi-dong, Gangnam-gu, Seoul 135-280, 135-280, KR)

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