PROBE CARD FOR POWER DEVICE - TOKYO ELECTRON LTD

Title:

PROBE CARD FOR POWER DEVICE

Document Type and Number:

WIPO Patent Application WO/2013/018910

Kind Code:

A1

Abstract:

Provided is a probe card for power devices, which significantly reduces resistance of a measurement line between a probe and a tester, and resistance of a measurement line between a placing table and the tester, and is capable of sufficiently ensuring reliability even if used as an actual apparatus for a probe apparatus. A probe card (10) of the present invention is provided with: a first probe (11), which is to be in electrical contact with an emitter electrode of a power device (D); a block-like first connecting terminal (12) having the first probe (11) connected thereto; a second probe (13), which is to be in electrical contact with a gate electrode of the power device (D); a block-like second connecting terminal (14) connected to the second probe (13); a contact plate (15), which can be in electrical contact with the collector electrode side of the power device (D); and a block-like third connecting terminal (16), which is fixed to the contact plate (15). The first, second, and third connecting terminals (12, 14, 16) are directly brought into electrical contact with respective corresponding connecting terminals on the tester side.

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Inventors:

SHINOHARA EIICHI (JP)
OGASAWARA IKUO (JP)
TAOKA KEN (JP)

Application Number:

PCT/JP2012/069925

Publication Date:

February 07, 2013

Filing Date:

July 30, 2012

Export Citation:

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Assignee:

TOKYO ELECTRON LTD (JP)
SHINOHARA EIICHI (JP)
OGASAWARA IKUO (JP)
TAOKA KEN (JP)

International Classes:

G01R31/26; G01R1/06; H01L21/66

Foreign References:

JP2011138865A	2011-07-14
JP2006344662A	2006-12-21
JPH08184639A	1996-07-16

Other References: