Title:
PROBE CARD-SECURING DEVICE, PROBE INSPECTION DEVICE, PROBE INSPECTION METHOD, AND PROBE CARD
Document Type and Number:
WIPO Patent Application WO/2013/190844
Kind Code:
A1
Abstract:
Provided are a probe card-securing device, a probe inspection device, a probe inspection method, and a probe card, in which fluctuations in the distal end position of the probe needle caused by thermal expansion of the probe card and the card holder can be minimized. A probe card-securing device for securing a probe card (10) to a prober, the probe card-securing device comprising: a connection ring (30) for securing to the prober casing; a card holder (20) for holding the external peripheral part of the probe card (10) between the connection ring (30) and the card holder (20); and a PCLS (50) for securing the center part of the probe card (10) and the connection ring (30).
More Like This:
| WO/2013/176445 | PROBE CARD |
| JP6380549 | probe |
Inventors:
YAMAZAKI TOSHIHIKO (JP)
Application Number:
PCT/JP2013/003865
Publication Date:
December 27, 2013
Filing Date:
June 20, 2013
Export Citation:
Assignee:
ASAHI KASEI MICRODEVICES CORP (JP)
International Classes:
G01R1/073
Foreign References:
| JP2008082912A | 2008-04-10 | |||
| JP2006108456A | 2006-04-20 | |||
| JP2004205487A | 2004-07-22 |
Attorney, Agent or Firm:
MORI, Tetsuya et al. (JP)
Woods Tetsuya (JP)
Woods Tetsuya (JP)
Download PDF:
Previous Patent: PHOTO-ACOUSTIC MICROSCOPE
Next Patent: INSULATING WALL, INSULATING BOX, AND MANUFACTURING METHOD THEREFOR
Next Patent: INSULATING WALL, INSULATING BOX, AND MANUFACTURING METHOD THEREFOR