Title:
PROBE CARD
Document Type and Number:
WIPO Patent Application WO/1998/058266
Kind Code:
A1
Abstract:
A probe card having an improved reliability of connection between a probe (5c) of a membrane (5) and a pad (23a) on a wafer IC (23). The base (12c) of a mount (12) is fitted in a through hole (4a) of a printed board (4) and a load stem (8) is supported by a bearing (39) movably only in the vertical direction substantially in the center of the mount. A compression coil spring (7) is fitted around the stem and given a biasing force for moving the stem downward. A stiffener block (31) having a recess (31c) to be engaged with a spherical pressing part (8a) at the lower end of the stem is held by a holding member (33) movably a little upward and horizontally against the biaising force of the coil spring in a state where it projects down from the bottom face of the printed board. A thin flexible insulating membrane (5) having a plurality of probes (5c) in the central region on its bottom face is fixed to the bottom face of the printed board. Part of the top face of the membrane, including the central region, is bonded to the bottom face of the stiffener block through an elastic sheet (44).
Inventors:
KOJIMA AKIO (JP)
Application Number:
PCT/JP1998/002669
Publication Date:
December 23, 1998
Filing Date:
June 17, 1998
Export Citation:
Assignee:
ADVANTEST CORP (JP)
KOJIMA AKIO (JP)
KOJIMA AKIO (JP)
International Classes:
G01R1/073; G01R31/28; (IPC1-7): G01R1/073
Foreign References:
| JPH0883824A | 1996-03-26 | |||
| JPS61129501A | 1986-06-17 | |||
| US5355079A | 1994-10-11 | |||
| JPH077056A | 1995-01-10 | |||
| JPH05215775A | 1993-08-24 | |||
| JPH01128381A | 1989-05-22 | |||
| JPS62153582U | 1987-09-29 |
Attorney, Agent or Firm:
Kusano, Takashi (2-21 Shinjuku 4-chom, Shinjuku-ku Tokyo, JP)
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