Title:
PROBE CARD
Document Type and Number:
WIPO Patent Application WO/2017/022035
Kind Code:
A1
Abstract:
[Purpose] The present invention provides a probe card that makes it possible to increase the space between a probe and a side wall of a holder that faces the probe. [Structure] A probe card C is provided with a holder 100a, a holder 100g, a cantilevered first probe 200a, and a cantilevered second probe 200g. The probe 200a is held by the holder 100a across a gap in the Y‒Y' direction so that a distal end part 210a projects from a first side wall 110a of the holder 100a. The probe 200g is held by the holder 100g across a gap in the X‒X' direction so that a distal end part 210g projects from a first side wall 110g of the holder 100g. In the probe 200g, a distal end 211g1 of the distal end part 210g of the probe 200g on the furthest end, which is positioned furthest toward the X' direction side, is positioned further along toward the X' direction than a root 212g1 of the distal end part 210g of the second probe 200g on the furthest end.
Inventors:
SERIKAWA AKIRA (JP)
KAKINO TAKAO (JP)
KAKINO TAKAO (JP)
Application Number:
PCT/JP2015/071867
Publication Date:
February 09, 2017
Filing Date:
July 31, 2015
Export Citation:
Assignee:
JAPAN ELECTRONIC MATERIALS (JP)
International Classes:
G01R1/073; H01L21/66
Foreign References:
| JPH10223705A | 1998-08-21 | |||
| JPH10123175A | 1998-05-15 | |||
| JP2002311048A | 2002-10-23 | |||
| JP2005302917A | 2005-10-27 |
Attorney, Agent or Firm:
ONISHI, Masao (JP)
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