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Patent Searching and Data


Title:
PROBE CARD
Document Type and Number:
WIPO Patent Application WO/2017/175573
Kind Code:
A1
Abstract:
Provided is a probe card with which the adjustment of height deviations of needle tip parts of probes and the adjustment of parallelism between the probes and an object to be inspected are simplified. The probe card 1 has: a wiring substrate 2 having wiring 4 therein or on a surface thereof or the like; a plurality of probes 3; and a dielectric film 6. The dielectric film 6 is disposed to be spaced a distance away from a main surface 8 of the wiring substrate 2 at a position spaced away further from the wiring substrate 2 than the needle tip parts 13 of the probes 3, so that one surface 21 of the dielectric film 6 faces the needle tip parts 13 and faces the main surface 8 that is a probe installation surface of the wiring substrate 2. The probe card 1 configures a state in which the needle tip parts 13 face an electrode of an object to be inspected with the dielectric film 6 interposed between the probe card 1 and the needle tip parts 13, during an inspection of the object to be inspected. An inspection signal supplied from an inspection device to the probes 3 is set as an alternating current signal, and the probe card 1 causes capacitive coupling between the needle tip parts 13 and the electrode of the object to be inspected, and transmits the inspection signal.

Inventors:
FUKAMI, Yoshiyuki (6-8 Kichijojihoncho 2-chome, Musashino-sh, Tokyo 08, 〒1808508, JP)
KIYOFUJI, Hidehiro (6-8 Kichijojihoncho 2-chome, Musashino-sh, Tokyo 08, 〒1808508, JP)
OTABE, Noboru (6-8 Kichijojihoncho 2-chome, Musashino-sh, Tokyo 08, 〒1808508, JP)
Application Number:
JP2017/011129
Publication Date:
October 12, 2017
Filing Date:
March 21, 2017
Export Citation:
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Assignee:
KABUSHIKI KAISHA NIHON MICRONICS (6-8 Kichijojihoncho 2-chome, Musashino-shi Tokyo, 08, 〒1808508, JP)
International Classes:
G01R1/06; G01R1/07; G01R1/073; G01R31/302; H01L21/66
Domestic Patent References:
WO2009099122A12009-08-13
Foreign References:
JP2005331523A2005-12-02
US20150022223A12015-01-22
Attorney, Agent or Firm:
SEKIGUCHI, Masao et al. (LOGOS Patent Attorneys Office, 6F Ginza Sanno Building, 4-10-10 Ginza, Chuo-k, Tokyo 61, 〒1040061, JP)
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