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Title:
PROBE CARD
Document Type and Number:
WIPO Patent Application WO/2023/008227
Kind Code:
A1
Abstract:
A probe card comprising an insulation layer, a first conductor that at least partially extends along the surface of the insulation layer, and a second conductor that at least partially passes through at least part of the insulation layer.

Inventors:
TODOROKI TAKESHI (JP)
Application Number:
PCT/JP2022/027830
Publication Date:
February 02, 2023
Filing Date:
July 15, 2022
Export Citation:
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Assignee:
YOKOWO SEISAKUSHO KK (JP)
International Classes:
G01R1/073; G01R1/067; G01R31/26; H01L21/66
Foreign References:
JP2019109101A2019-07-04
JP2019109103A2019-07-04
JP2019109102A2019-07-04
JP2004150927A2004-05-27
US20120313659A12012-12-13
Attorney, Agent or Firm:
HAYAMI Shinji et al. (JP)
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