Title:
PROBE DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/014231
Kind Code:
A1
Abstract:
This probe device is equipped with: a housing which has a first surface and a second surface; a probe which has a first contact section exposed to the first surface and a second contact section exposed to the second surface, is supported by the housing, and is configured in a manner such that the first contact section and/or the second contact section comprise a conductive ceramic material; and an elastic part which is positioned inside the housing so as to contact the probe and the housing. The probe changes orientation inside the housing in a manner such that the position of the second contact section which constitutes the contact region for contacting an electrode pad changes in response to a positional change of the first contact section. The elastic part elastically deforms in response to a change in the orientation of the probe inside the housing, and biases the probe in a direction which negates the positional change of the first contact section.
Inventors:
KUGA TOMOAKI (JP)
Application Number:
PCT/JP2023/022457
Publication Date:
January 18, 2024
Filing Date:
June 16, 2023
Export Citation:
Assignee:
NIHON MICRONICS KK (JP)
International Classes:
G01R1/073; G01R1/06; G01R1/067; G01R31/26; G01R31/28; H01R33/76
Foreign References:
| JP2003123874A | 2003-04-25 | |||
| JPH0720566U | 1995-04-11 | |||
| JP2006010588A | 2006-01-12 | |||
| JPH1131566A | 1999-02-02 | |||
| JP2010096702A | 2010-04-30 | |||
| JP2013061188A | 2013-04-04 | |||
| US6093030A | 2000-07-25 | |||
| JP2019035660A | 2019-03-07 |
Attorney, Agent or Firm:
MIYOSHI Hidekazu et al. (JP)
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