Title:
PROBE GUIDE
Document Type and Number:
WIPO Patent Application WO/2022/024888
Kind Code:
A1
Abstract:
The probe guide (30) according to the present disclosure guides a probe pin (20), the probe guide (30) comprising a base (31) that is formed from a ceramic and that has a plurality of through-holes (32) in which the probe pin (20) is inserted. The base (31) has a SiO film (33) in at least some of the through-holes (32).
Inventors:
ABE YUICHI (JP)
Application Number:
PCT/JP2021/027215
Publication Date:
February 03, 2022
Filing Date:
July 20, 2021
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
C04B41/80; C04B35/569; G01R1/073; G01R31/26
Domestic Patent References:
| WO2019093370A1 | 2019-05-16 |
Foreign References:
| JP2014174145A | 2014-09-22 | |||
| JP2017201321A | 2017-11-09 | |||
| JP2017096796A | 2017-06-01 | |||
| JP2014232030A | 2014-12-11 | |||
| JP2017150864A | 2017-08-31 | |||
| JP2019005752A | 2019-01-17 | |||
| JP2003179133A | 2003-06-27 | |||
| JP2000121673A | 2000-04-28 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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