Title:
PROBE PIN, PROBE CARD, AND PROBE DEVICE
Document Type and Number:
WIPO Patent Application WO/2007/066643
Kind Code:
A1
Abstract:
[PROBLEMS] To increase the life of a probe pin. [MEANS FOR SOLVING THE PROBLEMS]
The contact part of the probe pin is formed of a tin smaller in strength than the
electrode of a wafer (W). Thus, since the probe pin is broken when it is separated
from the electrode, a part of the electrode can be prevented from adhering to the
probe pin. A container for reserving a molten tin is installed on a probe device.
The container is three-dimensionally movable by a moving mechanism so that the
probe pin can be immersed into the molten tin in the container. Consequently,
it is possible to supply the tin onto the surface of the broken probe pin.
Inventors:
KATAOKA KENICHI (JP)
TOH KA (JP)
ITOH TOSHIHIRO (JP)
TOH KA (JP)
ITOH TOSHIHIRO (JP)
Application Number:
PCT/JP2006/324232
Publication Date:
June 14, 2007
Filing Date:
December 05, 2006
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
UNIV TOKYO (JP)
KATAOKA KENICHI (JP)
TOH KA (JP)
ITOH TOSHIHIRO (JP)
UNIV TOKYO (JP)
KATAOKA KENICHI (JP)
TOH KA (JP)
ITOH TOSHIHIRO (JP)
International Classes:
G01R1/067; G01R1/073; G01R31/28; H01L21/66
Foreign References:
| JPH01291167A | 1989-11-22 | |||
| JP2005069711A | 2005-03-17 | |||
| JP2002139542A | 2002-05-17 | |||
| JP2000260516A | 2000-09-22 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo (Shinjuku Akebonobashi Building 1-12, Sumiyoshi-cho, Shinjuku-k, Tokyo 65, JP)
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