Title:
PROBE PIN AND PROBE CARD
Document Type and Number:
WIPO Patent Application WO/2023/188369
Kind Code:
A1
Abstract:
A probe pin (20) comprises: a low-resistance portion (L) made of a first metal having conductivity; and a high-resistance portion (H) made of a second metal having conductivity with higher resistivity than the low-resistance portion (L). A five-layer part (T5), in which the high-resistance portion (H), a slit (S) as a clearance, the low-resistance portion (L), a slit (S) as a clearance, and the high-resistance portion (H) are sequentially configured as five layers, is provided between a contact portion (20c) and a terminal portion (20t) in a first direction (Y) different from a buckling direction (Z) of the probe pin (20) in an inspection on a test object (W).
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Inventors:
OKUMA KOKI (JP)
Application Number:
PCT/JP2022/016805
Publication Date:
October 05, 2023
Filing Date:
March 31, 2022
Export Citation:
Assignee:
JAPAN ELECTRONIC MAT CORPORATION (JP)
International Classes:
G01R1/067; G01R1/073; G01R31/28
Domestic Patent References:
WO2021122326A1 | 2021-06-24 |
Foreign References:
JP2018091870A | 2018-06-14 | |||
JP2013007700A | 2013-01-10 | |||
CN109425765A | 2019-03-05 | |||
JP2009272308A | 2009-11-19 | |||
JP5995953B2 | 2016-09-21 |
Attorney, Agent or Firm:
PALMO PATENT FIRM, P.C. (JP)
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