Title:
A PROBE FOR TESTING AN ELECTRICAL PROPERTY OF A TEST SAMPLE
Document Type and Number:
WIPO Patent Application WO/2018/162343
Kind Code:
A3
Abstract:
A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe (10) comprises a probe body (12), a first cantilever (20a) extending from the probe body. The first cantilever defining a first loop with respect to said probe body. The probe further comprises a first contact probe being supported by said first cantilever, and a second contact probe being electrically insulated from the first contact probe. The second contact probe being supported by the first cantilever or by a second cantilever (20b) extending from the probe body.
Inventors:
SHIV LIOR (DK)
Application Number:
PCT/EP2018/055159
Publication Date:
October 25, 2018
Filing Date:
March 02, 2018
Export Citation:
Assignee:
CAPRES AS (DK)
International Classes:
G01R1/067; G01R1/073; G01R3/00; G01R31/26; G01R31/28; H01L21/66
Domestic Patent References:
| WO2013190025A1 | 2013-12-27 | |||
| WO2007066643A1 | 2007-06-14 |
Foreign References:
| EP2293086A1 | 2011-03-09 | |||
| US20020142509A1 | 2002-10-03 | |||
| US20150192617A1 | 2015-07-09 | |||
| EP2141503A1 | 2010-01-06 | |||
| US20040217350A1 | 2004-11-04 | |||
| US6196061B1 | 2001-03-06 | |||
| US20110126329A1 | 2011-05-26 | |||
| EP1197726A1 | 2002-04-17 | |||
| EP1182460A2 | 2002-02-27 | |||
| EP1939640A2 | 2008-07-02 |
Other References:
KELLER S ET AL: "Microscopic four-point probe based on SU-8 cantilevers", REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, vol. 76, no. 12, 14 December 2005 (2005-12-14), pages 125102 - 125102, XP012079131, ISSN: 0034-6748, DOI: 10.1063/1.2140443
KATAOKA K ET AL: "Electroplating Ni micro-cantilevers for low contact-force IC probing", SENSORS AND ACTUATORS A: PHYS, ELSEVIER BV, NL, vol. 103, no. 1-2, 15 January 2003 (2003-01-15), pages 116 - 121, XP004400389, ISSN: 0924-4247, DOI: 10.1016/S0924-4247(02)00312-6
KATAOKA K ET AL: "Electroplating Ni micro-cantilevers for low contact-force IC probing", SENSORS AND ACTUATORS A: PHYS, ELSEVIER BV, NL, vol. 103, no. 1-2, 15 January 2003 (2003-01-15), pages 116 - 121, XP004400389, ISSN: 0924-4247, DOI: 10.1016/S0924-4247(02)00312-6
Attorney, Agent or Firm:
BUDDE SCHOU A/S (DK)
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