Title:
PROBE UNIT, SUBSTRATE INSPECTION DEVICE, AND METHOD FOR ASSEMBLING PROBE UNIT
Document Type and Number:
WIPO Patent Application WO/2014/123031
Kind Code:
A1
Abstract:
Through the present invention, the effective buckling length of a probe can easily be changed while keeping manufacturing cost low. The present invention is provided with a plurality of probes (11a), a support part for supporting the probes (11a), and an electrode plate provided on the support part, the support part is configured so as to be provided with support plates (41, 42) for supporting distal-end parts of the probes (11a) inserted through support holes (51, 52), and support plates (43, 44) for supporting proximal-end parts of the probes (11a) inserted through support holes (53, 54), and is configured so as to be able to move between a first orientation in which the support plates (41-44) are stacked so that open surfaces of the support holes (51-54) are aligned along the direction perpendicular to the support plates (41-44), and a second orientation in which the support plates (43, 44) are in contact with each other and the support plate (42) and support plate (43) are separated, and so that it is possible in the second orientation to change the distance (D2) between the support plate (42) and the support plate (43) while maintaining a constant distance (D1) between an inside surface of the support plate (42) and an outside surface of the support plate (44).
Inventors:
KOBAYASHI MASASHI (JP)
Application Number:
PCT/JP2014/051767
Publication Date:
August 14, 2014
Filing Date:
January 28, 2014
Export Citation:
Assignee:
HIOKI ELECTRIC WORKS (JP)
International Classes:
G01R1/073; G01R1/06; H01L21/66
Foreign References:
| JP2002090410A | 2002-03-27 | |||
| JPH11125646A | 1999-05-11 | |||
| JP2007512516A | 2007-05-17 | |||
| JP2008134248A | 2008-06-12 |
Attorney, Agent or Firm:
SAKAI, SHINJI (JP)
Shinji Sakai (JP)
Shinji Sakai (JP)
Download PDF: