Title:
PROBE UNIT
Document Type and Number:
WIPO Patent Application WO/2016/043327
Kind Code:
A1
Abstract:
In this probe unit that houses multiple contact probes for electrically connecting a test object and a signal processing device that outputs test signals, the probe unit is configured so that large current probes (3) electrically connect at both ends with electrodes of an object in contact therewith and pass large currents via metal blocks (50) that contact both ends of the large current probes (3). Therefore the probe unit is suitable for passing large currents.
Inventors:
YAMADA YOSHIO (JP)
HIRONAKA KOHEI (JP)
HIRONAKA KOHEI (JP)
Application Number:
PCT/JP2015/076789
Publication Date:
March 24, 2016
Filing Date:
September 18, 2015
Export Citation:
Assignee:
NHK SPRING CO LTD (JP)
International Classes:
G01R1/073; G01R1/067; G01R31/26; H01L21/66; H01R13/24
Domestic Patent References:
WO2011162362A1 | 2011-12-29 |
Foreign References:
JP2013117476A | 2013-06-13 | |||
US20030132773A1 | 2003-07-17 | |||
JP2013224891A | 2013-10-31 |
Attorney, Agent or Firm:
SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)
Hiroaki Sakai (JP)
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