Title:
PROBE UNIT
Document Type and Number:
WIPO Patent Application WO/2022/158032
Kind Code:
A1
Abstract:
The probe unit according to the present invention comprises a contact probe with which electrodes to be contacted are contacted at both lengthwise direction ends, and a probe holder provided with an insulative body that holds the contact probe. Formed in the body are a holder hole in which the contact probe is inserted and held, and a counterbore that is bored in at least in a portion of the periphery of the holder hole in the surface of the contact probe on one or both of the end sides, an inner wall surface that forms a hollow space having insulating properties.
Inventors:
SASAKI FUTA (JP)
ARAI HAJIME (JP)
SOMA KAZUYA (JP)
ARAI HAJIME (JP)
SOMA KAZUYA (JP)
Application Number:
PCT/JP2021/033413
Publication Date:
July 28, 2022
Filing Date:
September 10, 2021
Export Citation:
Assignee:
NHK SPRING CO LTD (JP)
International Classes:
H01L21/66; G01R1/067; G01R1/073; G01R31/26
Domestic Patent References:
| WO2020111076A1 | 2020-06-04 | |||
| WO2010117080A1 | 2010-10-14 |
Foreign References:
| JP2013195282A | 2013-09-30 | |||
| JP2002148306A | 2002-05-22 | |||
| JP2004340867A | 2004-12-02 | |||
| JP2003123923A | 2003-04-25 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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