Title:
PROBER
Document Type and Number:
WIPO Patent Application WO/2015/015921
Kind Code:
A1
Abstract:
Provided is a prober wherein a probe head can be easily replaced. A prober (10) is provided with: a main body (12); a stage (11), which is disposed in the main body (12), and which has a wafer (W) placed thereon; a probe card (16), which is disposed in the main body (12), and which faces the stage (11); and a probe head holder (24), which is disposed in the main body (12), and which is capable of moving toward the probe card (16). The probe card (16) has a probe head (30), which can be attached to and detached from the probe card (16), and which has a plurality of probe needles (35) disposed thereon, and the probe head holder (24) moves toward the probe card (16) by holding the probe head (30).
Inventors:
MIYAZONO MITSUYOSHI (JP)
Application Number:
PCT/JP2014/065664
Publication Date:
February 05, 2015
Filing Date:
June 06, 2014
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G01R31/26; H01L21/66
Foreign References:
| JP2010210478A | 2010-09-24 | |||
| JPS6424437A | 1989-01-26 | |||
| JPH10319076A | 1998-12-04 | |||
| JP2007040926A | 2007-02-15 | |||
| JPH07297242A | 1995-11-10 | |||
| JP2009500633A | 2009-01-08 |
Other References:
See also references of EP 3012645A4
Attorney, Agent or Firm:
BECCHAKU, Shigehisa et al. (JP)
Role of another Shigehisa (JP)
Role of another Shigehisa (JP)
Download PDF:
Previous Patent: IMAGE PICKUP MODULE MANUFACTURING METHOD, AND IMAGE PICKUP MODULE MANUFACTURING DEVICE
Next Patent: FILTER AND TARGET SUPPLY APPARATUS
Next Patent: FILTER AND TARGET SUPPLY APPARATUS