Title:
PROCESS AND APPARATUS FOR BLENDING AND DISTRIBUTING A SLURRY SOLUTION
Document Type and Number:
WIPO Patent Application WO2002053273
Kind Code:
A8
Abstract:
On-site blending and distribution of oxide abrasives with other constituents as used in semiconductor applications. Constituent blending is accomplished through weighing components individually into a blending tank. Some components may be added by injection or weight. Alternatively blends can be made to varying concentrations by passing the blended oxide solution in a closed circulation loop through a calibrated encapsulated torroid coil to measure electrical conductivity. The resulting conductivity output may be used to add one or more component.
Inventors:
SNYDER DAVID L
URQUHART KARL J
SWINDELL RICHARD DEAN
URQUHART KARL J
SWINDELL RICHARD DEAN
Application Number:
PCT/IB2001/002608
Publication Date:
January 15, 2004
Filing Date:
December 17, 2001
Export Citation:
Assignee:
AIR LIQUIDE (FR)
International Classes:
B01F7/00; B01F15/02; B01F15/04; B24B37/04; B24B57/02; H01L21/304; B01F3/12; (IPC1-7): B01F15/04; G01G19/22
Download PDF:
Previous Patent: METHOD OF SEPARATING ISOTOPES
Next Patent: HIGH-PRESSURE DEVICE FOR PRODUCING SUPERHARD MATERIALS
Next Patent: HIGH-PRESSURE DEVICE FOR PRODUCING SUPERHARD MATERIALS