Title:
PROCESS BOAT AND SHELL FOR WAFER PROCESSING
Document Type and Number:
WIPO Patent Application WO2004113228
Kind Code:
A3
Abstract:
In one embodiment, an apparatus for wafer processing comprises a boat (510) and a shell. The shell (521, 522) may be configured to receive and enclose the boat (510), which in turn may be configured to receive a plurality of wafers. The shell (521, 522) may include a plurality of slots (523) to allow vapor to escape out of the shell (521, 522) and away from the wafers during a temperature ramp down. The apparatus may be employed in a variety of wafer processing applications including in processes for increasing the bulk conductivity of ferroelectric materials, for example.
Inventors:
MILES RONALD O (US)
GALAMBOS LUDWIG L (US)
LAZAR JANOS J (US)
GALAMBOS LUDWIG L (US)
LAZAR JANOS J (US)
Application Number:
PCT/US2004/018621
Publication Date:
August 11, 2005
Filing Date:
June 10, 2004
Export Citation:
Assignee:
SILICON LIGHT MACHINES CORP (US)
MILES RONALD O (US)
GALAMBOS LUDWIG L (US)
LAZAR JANOS J (US)
MILES RONALD O (US)
GALAMBOS LUDWIG L (US)
LAZAR JANOS J (US)
International Classes:
C01G33/00; C01G35/00; H01L21/00; H01L21/673; (IPC1-7): H01L21/20; C23C16/44
Foreign References:
| US4854266A | 1989-08-08 | |||
| US4355974A | 1982-10-26 | |||
| US4547404A | 1985-10-15 |
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