Title:
PROCESS FOR MANUFACTURING NEODYMIUM-IRON-BORON-BASED RARE EARTH POWDER OR SPUTTERING TARGET, NEODYMIUM-IRON-BORON-BASED RARE EARTH POWDER OR SPUTTERING TARGET, AND NEODYMIUM-IRON-BORON-BASED THIN FILM FOR RARE EARTH MAGNET OR MANUFACTURING PROCESS THEREFOR
Document Type and Number:
WIPO Patent Application WO/2015/019513
Kind Code:
A1
Abstract:
A process for manufacturing a neodymium-iron-boron-based rare earth powder, characterized by comprising: subjecting a raw material which comprises neodymium, iron and boron as main components to melting and casting in a vacuum, and thereby making an alloy ingot which has an oxygen concentration of 300ppm or less; and pulverizing the alloy ingot by a gas atomizing method using an inert gas, and thereby forming a powder which has an oxygen concentration of 500ppm or less. In making a neodymium-iron-boron-based rare earth powder or sputtering target, according to the present invention, the oxygen concentration of the target is reduced by reducing the quantity of moisture adhering to a raw material. Thus, the present invention enables stable formation of a film by a sputtering method or a pulsed laser deposition method, and creates an excellent effect of improving the magnetic characteristics of a rare earth magnet thin film and the productivity thereof.
Inventors:
SAWATARI HIRONOBU (JP)
Application Number:
PCT/JP2013/082529
Publication Date:
February 12, 2015
Filing Date:
December 04, 2013
Export Citation:
Assignee:
JX NIPPON MINING & METALS CORP (JP)
International Classes:
B22F9/08; B22F1/00; C23C14/34; H01F1/057; C22C38/00
Domestic Patent References:
| WO2011145477A1 | 2011-11-24 | |||
| WO2010090229A1 | 2010-08-12 |
Foreign References:
| JPH06322416A | 1994-11-22 | |||
| JPH0273905A | 1990-03-13 | |||
| JP2003221655A | 2003-08-08 | |||
| JPH04144207A | 1992-05-18 | |||
| JP2009123968A | 2009-06-04 | |||
| JP2012207274A | 2012-10-25 |
Attorney, Agent or Firm:
OGOSHI Isamu et al. (JP)
Isamu Ogoshi (JP)
Isamu Ogoshi (JP)
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