Title:
PROCESS FOR PRODUCING DIAMOND ELECTRON EMISSION ELEMENT AND ELECTRON EMISSION ELEMENT
Document Type and Number:
WIPO Patent Application WO/2005/031781
Kind Code:
A1
Abstract:
There is provided a process comprising the steps of forming a template with indentation on a substrate surface and effecting heteroepitaxial growth of diamond on the substrate in an atmosphere containing a doping material. It is preferred that the crystal structure of slant surface of the template with indentation on the substrate have cubic system crystal orientation (111) and that the doping material be phosphorus. Further, it is preferred that the substrate consist of Si and that the slant surface of the template be Si(111) surface. Moreover, there is provided a diamond electron emission element comprising diamond having projections on its surface, wherein the slant surface of projections (1) consists of a surface including diamond (111) and wherein non-projection planar portion (2) includes a grain boundary and plane direction other than (100) surface or (110) surface.
Inventors:
Tatsumi, Natsuo c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
Namba, Akihiko c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
Nishibayashi, Yoshiki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
Imai, Takahiro c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
Namba, Akihiko c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
Nishibayashi, Yoshiki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
Imai, Takahiro c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
Application Number:
PCT/JP2004/014671
Publication Date:
April 07, 2005
Filing Date:
September 29, 2004
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES, LTD. (5-33, Kitahama 4-chome Chuo-k, Osaka-shi Osaka, 541-0041, JP)
Tatsumi, Natsuo c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
Namba, Akihiko c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
Nishibayashi, Yoshiki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
Imai, Takahiro c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
Tatsumi, Natsuo c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
Namba, Akihiko c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
Nishibayashi, Yoshiki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
Imai, Takahiro c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chom, Itami-shi Hyogo, 664-0016, JP)
International Classes:
H01J1/304; H01J9/02; (IPC1-7): H01J9/02; H01J1/304
Attorney, Agent or Firm:
Nakano, Minoru c/o Sumitomo Electric Industries Ltd. (1-3, Shimaya 1-chome, Konohana-k, Osaka-shi Osaka, 554-0024, JP)
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