PROCESS FOR PRODUCING LAYERED MEMBER AND LAYERED MEMBER

Title:

PROCESS FOR PRODUCING LAYERED MEMBER AND LAYERED MEMBER

Document Type and Number:

WIPO Patent Application WO/2005/088666

Kind Code:

A1

Abstract:

A photoelectric surface member capable of enhancing of quantum efficiency. There is provided photoelectric surface member (1a) comprising a crystalline layer produced from a nitride semiconductor material, which is composed of nitride semiconductor crystal layer (10) wherein the direction from first face (101) to second face (102) is a negative c-polarity direction of crystal, adhesive layer (12) provided along the first face (101) of the nitride semiconductor crystal layer (10), and glass plate (14) adhesion fixed to the adhesive layer (12) so as to have the adhesive layer (12) interposed between the glass plate (14) and the nitride semiconductor crystal layer (10). The nitride semiconductor crystal layer (10) can be produced from substrate for crystal growth (50) whose main surface plane direction is (111).

Inventors:

Nihashi, Tokuaki c/o Hamamatsu, Photonics K. K. (1126-1 Ichino-ch, Hamamatsu-shi Shizuoka 58, 43585, JP)
Sumiya, Masatomo (KI-A, Parkwood 278-1, Tomitsuka-ch, Hamamatsu-shi Shizuoka 02, 43280, JP)
Hagino, Minoru c/o Hamamatsu, Photonics K. K. (1126-1 Ichino-ch, Hamamatsu-shi Shizuoka 58, 43585, JP)
Fuke, Shunro (3-40-8, Sanarudai Hamamatsu-shi, Shizuoka 21, 43280, JP)

Application Number:

PCT/JP2005/003879

Publication Date:

September 22, 2005

Filing Date:

March 07, 2005

Export Citation:

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Assignee:

HAMAMATSU PHOTONICS K.K. (1126-1, Ichino-cho Hamamatsu-shi, Shizuoka 58, 43585, JP)
Nihashi, Tokuaki c/o Hamamatsu, Photonics K. K. (1126-1 Ichino-ch, Hamamatsu-shi Shizuoka 58, 43585, JP)
Sumiya, Masatomo (KI-A, Parkwood 278-1, Tomitsuka-ch, Hamamatsu-shi Shizuoka 02, 43280, JP)
Hagino, Minoru c/o Hamamatsu, Photonics K. K. (1126-1 Ichino-ch, Hamamatsu-shi Shizuoka 58, 43585, JP)
Fuke, Shunro (3-40-8, Sanarudai Hamamatsu-shi, Shizuoka 21, 43280, JP)

International Classes:

C23C16/01; C30B29/38; C30B29/40; H01J1/34; H01J9/12; H01J40/06; H01L21/205; C23C16/00; C30B29/10; H01J1/02; H01J9/12; H01J40/00; H01L21/02; (IPC1-7): H01J1/34; C23C16/01; C30B29/38; H01J40/06; H01L21/205

Attorney, Agent or Firm:

Hasegawa, Yoshiki (SOEI PATENT AND LAW FIRM, Ginza First Bldg. 10-6, Ginza 1-chom, Chuo-ku Tokyo 61, 10400, JP)

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