Title:
PROCESS FOR PRODUCING MULTILAYER FILM
Document Type and Number:
WIPO Patent Application WO/2011/052764
Kind Code:
A1
Abstract:
Provided is a process for producing a multilayer film which, even when bent, is less apt to decrease in barrier property or electrical conductivity. The process comprises forming a barrier film and a transparent conductive film on a resin film to produce a multilayer film. The barrier film is formed by CVD assisted by a plasma generated by electric discharging between rolls. The transparent conductive film is preferably formed by physical vapor deposition. The resin film preferably is a polyester resin film or a polyolefin resin film.
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Inventors:
HASEGAWA, Akira (3-7-21-136, Kasuga Tsukuba-sh, Ibaraki 21, 〒3050821, JP)
長谷川 彰 (〒21 茨城県つくば市春日３－７－２１－１３６ Ibaraki, 〒3050821, JP)
KURODA, Toshiya (2-5-23-305, Umezono Tsukuba-sh, Ibaraki 45, 〒3050045, JP)
長谷川 彰 (〒21 茨城県つくば市春日３－７－２１－１３６ Ibaraki, 〒3050821, JP)
KURODA, Toshiya (2-5-23-305, Umezono Tsukuba-sh, Ibaraki 45, 〒3050045, JP)
Application Number:
JP2010/069394
Publication Date:
May 05, 2011
Filing Date:
October 26, 2010
Export Citation:
Assignee:
SUMITOMO CHEMICAL COMPANY, LIMITED (27-1, Shinkawa 2-chome Chuo-k, Tokyo 60, 〒1048260, JP)
住友化学株式会社 (〒60 東京都中央区新川二丁目２７番１号 Tokyo, 〒1048260, JP)
HASEGAWA, Akira (3-7-21-136, Kasuga Tsukuba-sh, Ibaraki 21, 〒3050821, JP)
長谷川 彰 (〒21 茨城県つくば市春日３－７－２１－１３６ Ibaraki, 〒3050821, JP)
住友化学株式会社 (〒60 東京都中央区新川二丁目２７番１号 Tokyo, 〒1048260, JP)
HASEGAWA, Akira (3-7-21-136, Kasuga Tsukuba-sh, Ibaraki 21, 〒3050821, JP)
長谷川 彰 (〒21 茨城県つくば市春日３－７－２１－１３６ Ibaraki, 〒3050821, JP)
International Classes:
H01B13/00; B32B9/00; C23C14/08; C23C16/50; H01L51/50; H05B33/02; H05B33/10; H05B33/28
Attorney, Agent or Firm:
NAKAYAMA, Tohru et al. (Limited 5-33, Kitahama 4-chome, Chuo-ku, Osaka-sh, Osaka 50, 〒5418550, JP)
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