PROCESS FOR PRODUCING ORIGINAL DISC FOR OPTICAL DISC AND ORIGINAL DISC FOR OPTICAL DISC

WIPO Patent Application WO/2005/055224

A1

An inorganic resist layer constituted of an incomplete oxide of transition metal is formed by sputtering on a substrate. A transition metal per se or its alloy or an oxide thereof is used as a target material, and oxygen or nitrogen is used as a reactive gas. The oxygen concentration of the inorganic resist layer can be varied along the thickness direction by changing the proportion or film formation output of reactive gas. The inorganic resist layer is exposed to light and developed to thereby obtain an original disc for optical disc furnished with a fine rugged pattern of pits, groups, etc. When the oxygen concentration is increased, a sensitivity enhancement can be achieved to thereby realize varying of sensitivity along the direction of thickness of the inorganic resist layer. Thus, rugged configurations with different depths can be provided on a single disc.

JPS55138838	METHOD OF FABRICATING SEMICONDUCTOR DEVICE
JPS6022322	[Title of the Invention] A manufacturing method of a stripe filter
JP2001162762	LITHOGRAPHIC PRINTING MACHINE AND METHOD FOR LITHOGRAPHIC PRINTING

SHIRASAGI TOSHIHIKO (JP)
MINEGISHI SHINJI (JP)

PCT/JP2004/018098

June 16, 2005

November 30, 2004

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SONY CORP (JP)
SHIRASAGI TOSHIHIKO (JP)
MINEGISHI SHINJI (JP)

G03F7/00; G03F7/004; G03F7/16; G11B7/26; G11B7/007; (IPC1-7): G11B7/26; G03F7/004

JP2003315988A	2003-11-06
JPH0229955A	1990-01-31
JPS6095741A	1985-05-29
JPH08227538A	1996-09-03
JPH02238457A	1990-09-20
JPH08180468A	1996-07-12
JPH11203731A	1999-07-30
JP2003237242A	2003-08-27
JP2003315988A	2003-11-06

See also references of EP 1691362A4

Sugiura, Masatomo (Ikebukuro Park Bldg. 49-7, Minami Ikebukuro 2-chom, Toshima-ku Tokyo 22, JP)

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