Title:
PROCESS FOR PRODUCTION OF CARBON NANOTUBE AGGREGATES, CARBON NANOTUBE AGGREGATES, CATALYST PARTICLE DISPERSION MEMBRANE, ELECTRON EMITTERS, AND FIELD EMISSION DISPLAYS
Document Type and Number:
WIPO Patent Application WO/2007/105707
Kind Code:
A1
Abstract:
A process for the production of carbon nanotube aggregates which makes it possible to control the growth and density of carbon nanotubes on a substrate, which comprises the step of preparing a substrate provided with a catalyst particle dispersion membrane wherein metal catalyst particles of prescribed particle diameters are dispersed among barrier particles and the thermal CVD step of making carbon nanotubes grow by the thermal decomposition of an organic compound with the metal catalyst particles acting as the base points.
Inventors:
TAKI, Yusuke (2-3 Marunouchi 3-chom, Chiyoda-ku Tokyo 31, 1008331, JP)
瀧 優介 (〒31 東京都千代田区丸の内三丁目２番３号 株式会社ニコン内 Tokyo, 1008331, JP)
SHINOHARA, Kiyoaki (2-3 Marunouchi 3-chom, Chiyoda-ku Tokyo 31, 1008331, JP)
瀧 優介 (〒31 東京都千代田区丸の内三丁目２番３号 株式会社ニコン内 Tokyo, 1008331, JP)
SHINOHARA, Kiyoaki (2-3 Marunouchi 3-chom, Chiyoda-ku Tokyo 31, 1008331, JP)
Application Number:
JP2007/054901
Publication Date:
September 20, 2007
Filing Date:
March 13, 2007
Export Citation:
Assignee:
NIKON CORPORATION (2-3 Marunouchi 3-chome, Chiyoda-ku Tokyo, 31, 1008331, JP)
株式会社ニコン (〒31 東京都千代田区丸の内三丁目２番３号 Tokyo, 1008331, JP)
TAKI, Yusuke (2-3 Marunouchi 3-chom, Chiyoda-ku Tokyo 31, 1008331, JP)
瀧 優介 (〒31 東京都千代田区丸の内三丁目２番３号 株式会社ニコン内 Tokyo, 1008331, JP)
株式会社ニコン (〒31 東京都千代田区丸の内三丁目２番３号 Tokyo, 1008331, JP)
TAKI, Yusuke (2-3 Marunouchi 3-chom, Chiyoda-ku Tokyo 31, 1008331, JP)
瀧 優介 (〒31 東京都千代田区丸の内三丁目２番３号 株式会社ニコン内 Tokyo, 1008331, JP)
International Classes:
C01B31/02; B01J21/18; B01J23/85; B01J35/02; B82B1/00; B82B3/00; H01J1/30; H01J31/12
Attorney, Agent or Firm:
NAGAHAMA, Noriaki (Nagahama International Patent Firm, Muraki Bldg. 8th Floor 2-10-10, Yaes, Chuo-ku Tokyo 28, 1040028, JP)
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