PROCESS FOR PRODUCTION OF HYDROFLUOROCARBONS, PRODUCTS THEREOF AND USE OF THE PRODUCTS

Title:

PROCESS FOR PRODUCTION OF HYDROFLUOROCARBONS, PRODUCTS THEREOF AND USE OF THE PRODUCTS

Document Type and Number:

WIPO Patent Application WO/2005/026090

Kind Code:

A1

Abstract:

A process which comprises reacting a halogenated methane mixture with hydrogen fluoride in a vapor phase in the presence of a fluorination catalyst in a single reaction zone, introducing the formed gas into a distilling column, and conducting the separation and purification of the gas therein to thereby obtain two or more hydrofluorocarbons. The process enables industrially advantageous production of hydrofluorocarbons useful as etching gas or cleaning gas in the production of semiconductor devices, particularly fluoromethane and difluoromethane, at high purity.

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Inventors:

OHNO HIROMOTO (JP)
ARAI TATSUHARU (JP)

Application Number:

PCT/JP2004/013482

Publication Date:

March 24, 2005

Filing Date:

September 09, 2004

Export Citation:

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Assignee:

SHOWA DENKO KK (JP)
OHNO HIROMOTO (JP)
ARAI TATSUHARU (JP)

International Classes:

C07C17/20; (IPC1-7): C07C17/10; C07C19/08

Domestic Patent References:

WO1989010341A1	1989-11-02
WO2000024696A1	2000-05-04

Foreign References:

JPH0761944A

1995-03-07

Attorney, Agent or Firm:

Aoki, Atsushi (Ishida & Associates Toranomon 37 Mori Bldg., 5-1, Toranomon 3-chom, Minato-ku Tokyo 23, JP)

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