PROCESS FOR PRODUCTION OF REPLICA MOLD FOR IMPRINTING USE

WIPO Patent Application WO/2011/161944

A1

Disclosed is a process for producing a replica mold for imprinting use which is inexpensive and has good properties including strength and flexibility. The process for producing a replica mold comprises the following steps: (A) applying an organic-inorganic composite material onto a base; (B) partially curing the coated surface with heat and/or an electromagnetic beam to produce a base on which a fine concave-convex pattern is to be formed; (C) pressing a master mold having a predetermined fine concave-convex pattern formed thereon against the base by an imprinting technique to transfer the fine concave-convex pattern onto the base; and (D) irradiating the base, onto which the pattern has been transferred, with an electromagnetic beam to cure the composite material on the base.

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JP2010171109	IMPRINTING MOLD PRECURSOR AND METHOD OF MANUFACTURING THE IMPRINTING MOLD PRECURSOR

KUMAZAWA, Kazuhisa (Nippon Soda Co. Ltd., 12-54, Goiminamikaigan, Ichihara-sh, Chiba 45, 〒2900045, JP)
熊澤　和久 (〒45 千葉県市原市五井南海岸１２－５４日本曹達株式会社　千葉研究所内 Chiba, 〒2900045, JP)

JP2011/003521

December 29, 2011

June 21, 2011

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Nippon Soda Co., Ltd. (2-1 Ohtemachi 2-chome, Chiyoda-ku Tokyo, 65, 〒1008165, JP)
日本曹達株式会社 (〒65 東京都千代田区大手町２－２－１ Tokyo, 〒1008165, JP)
KUMAZAWA, Kazuhisa (Nippon Soda Co. Ltd., 12-54, Goiminamikaigan, Ichihara-sh, Chiba 45, 〒2900045, JP)

B29C59/02; B29C33/38; H01L21/027

HIROTA, Masanori (3F Wakabayashi Building, 8-5 Akasaka 2-chome, Minato-k, Tokyo 52, 〒1070052, JP)

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