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Title:
PROCESS FOR TARGET PRODUCTION
Document Type and Number:
WIPO Patent Application WO/2006/095642
Kind Code:
A1
Abstract:
It is intended to produce a target at low cost by safely adding of an additive that is apt to catch fire in atmospheric air. An additive is added to a main material in low-oxygen ambient atmosphere, and molten primary alloy (13) is obtained. A further main material is added to the molten primary alloy (13) in air atmosphere so as to effect a weight increase, thereby obtaining a secondary alloy. Molten or solid primary alloy (13,18) is stable, so that any fire catching would not occur. As the amount of primary alloy (13,18) is less than the amount of secondary alloy, vacuum vessel (11) for forming of primary atmosphere can be compact.

Inventors:
Ota, Atsushi c/o Chiba, Institute For Super Materials (ULVAC Inc., 523 Yokota, Sanbu-machi, Sanbu-gu, Chiba 26, 28912, JP)
Sugiura, Isao c/o Chiba, Institute For Super Materials (ULVAC Inc., 523 Yokota, Sanbu-machi, Sanbu-gu, Chiba 26, 28912, JP)
Tani, Noriaki c/o Chiba, Institute For Super Materials (ULVAC Inc., 523 Yokota, Sanbu-machi, Sanbu-gu, Chiba 26, 28912, JP)
Matsumoto, Masahiro c/o Chiba, Institute For Super Materials (ULVAC Inc., 523 Yokota, Sanbu-machi, Sanbu-gu, Chiba 26, 28912, JP)
Katagiri, Hiroaki c/o Chiba, Institute For Super Materials (ULVAC Inc., 523 Yokota, Sanbu-machi, Sanbu-gu, Chiba 26, 28912, JP)
Masuda, Tadashi c/o Ulvac, Materials (Inc. 516 Yokota, Sanbu-machi, Sanbu-gu, Chiba 97, 28912, JP)
Ishibashi, Satoru c/o Chiba, Institute For Super Materials (ULVAC Inc., 523 Yokota, Sanbu-machi, Sanbu-gu, Chiba 26, 28912, JP)
Ito, Takaharu c/o Ulvac, Materials (Inc. 516 Yokota, Sanbu-machi, Sanbu-gu, Chiba 97, 28912, JP)
Application Number:
PCT/JP2006/304048
Publication Date:
September 14, 2006
Filing Date:
March 03, 2006
Export Citation:
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Assignee:
ULVAC, INC. (2500 Hagisono, Chigasaki-shi Kanagawa, 43, 25385, JP)
ULVAC Materials, Inc. (516 Yokota, Sanbu-machi Sanbu-gu, Chiba 97, 28912, JP)
Ota, Atsushi c/o Chiba, Institute For Super Materials (ULVAC Inc., 523 Yokota, Sanbu-machi, Sanbu-gu, Chiba 26, 28912, JP)
Sugiura, Isao c/o Chiba, Institute For Super Materials (ULVAC Inc., 523 Yokota, Sanbu-machi, Sanbu-gu, Chiba 26, 28912, JP)
Tani, Noriaki c/o Chiba, Institute For Super Materials (ULVAC Inc., 523 Yokota, Sanbu-machi, Sanbu-gu, Chiba 26, 28912, JP)
Matsumoto, Masahiro c/o Chiba, Institute For Super Materials (ULVAC Inc., 523 Yokota, Sanbu-machi, Sanbu-gu, Chiba 26, 28912, JP)
Katagiri, Hiroaki c/o Chiba, Institute For Super Materials (ULVAC Inc., 523 Yokota, Sanbu-machi, Sanbu-gu, Chiba 26, 28912, JP)
Masuda, Tadashi c/o Ulvac, Materials (Inc. 516 Yokota, Sanbu-machi, Sanbu-gu, Chiba 97, 28912, JP)
Ishibashi, Satoru c/o Chiba, Institute For Super Materials (ULVAC Inc., 523 Yokota, Sanbu-machi, Sanbu-gu, Chiba 26, 28912, JP)
Ito, Takaharu c/o Ulvac, Materials (Inc. 516 Yokota, Sanbu-machi, Sanbu-gu, Chiba 97, 28912, JP)
International Classes:
C23C14/34; C22C1/02; H01L21/285
Domestic Patent References:
WO1999034028A1
Foreign References:
JPH10317082A
Other References:
See also references of EP 1860207A1
None
Attorney, Agent or Firm:
Ishijima, Shigeo (Toranomonkougyou Bldg, 3F 1-2-18, Toranomon, Minato-ku Tokyo 01, 10500, JP)
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