SEMICONDUCTOR SWITCHES AND DRIVE CIRCUITRY ON COMPOUND

SEMICONDUCTOR CHIPLETS

Technical Field

[0001] This description generally relates to the fabrication of semiconductor devices and systems, and in particular relates to fabrication of semiconductor devices employing chiplets.

BACKGROUND

Description of the Related Art

[0002] The fabrication of compound semiconductor devices using small fragments of direct bandgap semiconductor materials has emerged as a technique for creating a variety of display, communication, and logic products. Semiconductors that have favorable optoelectronic properties due to their direct bandgap are particularly suitable for the fabrication of certain electronic components, e.g., lasers, LEDs, photodetectors, but typically are not suitable for fabrication of other electronic components, e.g., transistors. In order to provide switching, amplification, and device selection it may be necessary to hybridize electronic components employing a particular semiconductor material with electronic components employing a different semiconductor material, for example to provide transistors that offer switching and drive circuitry. There are also applications in the compound semiconductor field (e.g., high voltage drive) that produce transistors with switching characteristics that are limited in their applicability.

[0003] One approach that has been previously used to create hybrid devices with a mix of favorable properties is to bond or solder compound semiconductor optical components to single crystal silicon substrates, and to use silicon transistors on the single crystal silicon substrate for selection and drive functionality. This approach has been used both for arrays of optical components on compound semiconductor substrates as well as on individual chiplets which are distributed on a substrate. For example, Herrensdorf, et al. (Active-Matrix GaN Micro Light-Emitting Diode Display With Unprecedented Brightness (IEEE Transactions on Electron Devices Vol. 62, No. 6, page 1918 (June 2015)) applied this approach to a relatively sophisticated array of devices fabricated on a compound semiconductor wafer which has optoelectronic functionality but no available transistors, and a silicon integrated circuit which provides the drive and control circuitry for the device.

[0004] Radauscher, et al. (Passive Matrix Displays with Transfer-Printed Microscale

Inorganic LEDs, Invited Paper, 55-1 , M. Meiti; SID 2016 Digest, p 743) employs another approach to silicon/compound semiconductor hybridization, in which a compound semiconductor is partitioned into chiplets and released, as are silicon integrated circuits. These devices are then placed on a substrate and connected using interconnect fabricated using traditional thin film semiconductor processing approaches.

[0005] A second approach to realizing this functionality is to bond the chiplets to a glass or other substrate with a thin film transistor backplane. This transistor backplane can then provide the switching and selection required to implement the active matrix functionality required for the display component. In U.S. patent 9,159,700 (Sakariya et al.), for example, an array is envisioned in which compound semiconductor micro-LED chiplets are bonded to a glass substrate and are connected to a pre-fabricated TFT- containing backplane, e.g., through vias, to provide the required switching and addressing functionality to produce a display.

BRIEF SUMMARY

[0006] In at least one aspect, fabrication of semiconductor devices can be summarized as fabricating a first type of electronic device employing a first semiconductor layer, fabricating a second type of electronic device employing a second semiconductor layer, forming chiplets, and transferring the chiplets to a final substrate either directly or via an intermediate substrate. While the material of the first and the second semiconductor layers may be the same semiconductor, in many implementations these will advantageously be two different types of semiconductor materials.

[0007] In at least one aspect, the fabrication of semiconductor devices described herein can be summarized as using small elements of a semiconductor material (chiplets) fabricated using a first semiconductor material having a first set of physical and/or operational characteristics that are suitable or even optimized for a first function (e.g., a non-transistor functionality such as emission or detection of light), and combining such with a second semiconductor material having a second set of physical and/or operational characteristics that are suitable or even optimal for a second function (e.g., thin film transistors for addressing, switching, amplification, memory, low voltage logic, or other electronic functionality).

[0008] In yet another aspect, a fabrication process can be summarized as a semiconductor wafer with a specialized functionality is processed to implement functional devices. A thin film semiconductor is deposited and processed on this wafer to implement a second functionality. Chiplets with both semiconductor functionalities are then released and transferred to a target substrate, implementing the two functionalities in a single structure.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

[0009] In the drawings, identical reference numbers identify similar elements or acts.

The sizes and relative positions of elements in the drawings are not necessarily drawn to scale. For example, the shapes of various elements and angles are not drawn to scale, and some of these elements are arbitrarily enlarged and positioned to improve drawing legibility. Further, the particular shapes of the elements as drawn, are not intended to convey any information regarding the actual shape of the particular elements, and have been solely selected for ease of recognition in the drawings.

[00010] Figures 1A-1 G are cross-sectional views illustrating a sequence of operations to fabricate an electronic device according to at least one illustrated implementation, which employs a temporary carrier substrate to invert chiplets with LEDs allowing formation of transistor circuitry from a back surface side before transfer to a final substrate via pick and place machinery or an elastomeric stamp in the inverted orientation.

[00011] Figures 2A-2G are cross-sectional views illustrating a sequence of operations to fabricate an electronic device according to at least one illustrated implementation, which employs a temporary carrier substrate to invert chiplets with LEDs allowing formation of transistor circuitry from a back surface side thereof before transfer to a final substrate via selective laser release in the inverted orientation.

[00012] Figures 3A-3D are cross-sectional views illustrating a sequence of operations to fabricate an electronic device according to at least one illustrated implementation, in which transistor circuitry is formed from a front surface side over LEDs before direct transfer, without a temporary carrier or intermediate substrate, to a final substrate in an inverted orientation.

[00013] Figures 4A-4H are cross-sectional views illustrating a sequence of operations to fabricate an electronic device according to at least one illustrated implementation, in which transistor circuitry is formed from a front surface side over LEDs along with solder bumps before direct transfer, without a temporary carrier or intermediate substrate, to a final substrate in an inverted orientation, followed by a solder reflow operation and addition of color conversion material.

[00014] Figures 5A-5G are cross-sectional views illustrating a sequence of operations to fabricate an electronic device according to at least one illustrated implementation, in which transistor circuitry is formed from a front surface side over LEDs before direct transfer, without a temporary carrier or intermediate substrate, to a final substrate in an un-inverted orientation via release of tethered chiplets.

[00015] Figures 6A-6I are cross-sectional views illustrating a sequence of operations to fabricate an electronic device according to at least one illustrated implementation, in which transistor circuitry is formed from a front surface side over LEDs before direct transfer, without a temporary carrier or intermediate substrate, to a final substrate in an inverted orientation via release of tethered chiplets.

DETAILED DESCRIPTION

[00016] In the following description, certain specific details are set forth in order to provide a thorough understanding of various disclosed embodiments. However, one skilled in the relevant art will recognize that embodiments may be practiced without one or more of these specific details, or with other methods, components, materials, etc. In other instances, certain structures associated with light emitting diodes (LEDs), drive circuits, integrated circuits and fabrication equipment have not been shown or described in detail to avoid unnecessarily obscuring descriptions of the various implementations and embodiments.

[00017] Unless the context requires otherwise, throughout the specification and claims which follow, the word “comprise” and variations thereof, such as, “comprises” and “comprising” are to be construed in an open, inclusive sense, that is as“including, but not limited to.”

[00018] Reference throughout this specification to “one implementation” or “an implementation” or “one embodiment” or “an embodiment” means that a particular feature, structure or characteristic described in connection with the embodiment is included in at least one implementation or at least one embodiment. Thus, the appearances of the phrases“one implementation” or“an implementation” or“in one embodiment” or“in an embodiment” in various places throughout this specification are not necessarily all referring to the same implementation or the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more implementations or in one or more embodiments.

[00019] As used in this specification and the appended daims, the singular forms "a," "an," and "the" indude plural referents unless the content dearly dictates otherwise. It should also be noted that the term "or" is generally employed in its sense induding "and/or" unless the content dearly dictates otherwise.

[00020] The headings and Abstract of the Disdosure provided herein are for convenience only and do not interpret the scope or meaning of the implementations or embodiments.

[00021] Described herein are fabrication processes or methods, and structures or configurations in which chiplets are formed and isolated using a first semiconductor material. These first semiconductor material may have certain physical or operation characteristics that allow electronic components on the chiplets to have a certain functionality that is enhanced or optimized over what can be realized using other semiconductors. Thus, the chiplets may carry electronic components with functions that are particularly suitable or take advantage of the properties of the first semiconductor, e.g. high speed switching operations for transistors (such as a high electron mobility transistor (HEMT)), lasing, LED functionality, or photodetector functionality. A thin film semiconductor is deposited on the first semiconductor and processed to fabricate field effect transistors and circuits for control of the semiconductor (e.g. via lithography, doping, recrystallization, or other techniques). These chiplets with co-integrated control circuitry are then released and transferred to another substrate. The chiplets with integral control are then addressed and driven using the thin film semiconductors deposited and patterned on the compound semiconductor. It is possible to use an intermediate transfer substrate (such as an interposer), in which case the processing and singulation can occur i) while on the first substrate, ii) while on the intermediate transfer substrate, or iii) after transfer to a target or final substrate. While many of the specific examples discussed herein are described in term of light emitting diodes (LEDs), those are not intended to be limiting. For example, various electronic components, for example lasers, photodetectors and high speed transistors could be fabricated in lieu of, or in addition to, the exemplary LEDs.

[00022] Figures 1 A-1 G show a sequence of operations to fabricate an electronic device according to at least one illustrated implementation, which employs a temporary carrier or intermediate substrate to invert chiplets with LEDs allowing formation of transistor circuitry from a back surface side before transfer to a final substrate via pick and place machinery or an elastomeric stamp in the inverted orientation. In the implementation of Figures 1A-1 G, , an LED epiwafer is processed to create individual chiplets. The chiplets are transferred en masse to a temporary carrier or intermediate substrate, and released from a growth substrate of the LED epiwafer. TFT circuitry is deposited and structured on the chiplets The chiplets are then individually transferred to a target or final substrate and connected using a pick and place or elastomeric stamp transfer process. This can optionally be followed by a deposition of one or more color conversion layers and/or fabrication of one or more light extraction features to improve the extraction of light from the LEDs.

[00023] In particular, Figure 1 A shows a light emitting diode (LED) wafer (e.gr., epiwafer) 100 comprising a growth substrate 102 and a first semiconductor material in the form of an epitaxial LED layer 104, carried by the growth substrate 102. The epitaxial LED layer 104 has a front surface 104a, a back surface 104b opposed from the front surface 104a across a thickness of the epitaxial LED layer 104. The back surface 104b is at least proximally more adjacent the growth substrate 102 relative to the front surface 104a.

[00024] Figure 1 B shows fabrication of a plurality of a first type of semiconductor based electronic device in the first semiconductor material, illustrated as light emitting diodes 106 (only one called out). The LEDs 106 comprise a light generation or recombination region 106a of the epitaxial LED layer 104, and contacts 106b. The contacts 106b may be fabricated by depositing electrically conductive material, and patterning the electrically conductive material. Notably, the LEDs 106 are fabricated from a front surface side 108a. As also illustrated in Figure 1 B the LEDs 106 are structured into chiplets 110a, 110b (only two called out, collectively110).

[00025] Figure 1 C shows the resulting structure (e.g., chiplets 110 coupled to growth substrate 102) inverted, with the LEDs 106 bonded to a temporary carrier or intermediary substrate 112. The contacts 106b may be proximally adjacent the temporary carrier or intermediary substrate 112.

[00026] Figure 1 D shows removal of the growth substrate 102 to expose the back surface 104b of the LEDs 106 for further processing from a back surface side 108b. The growth substrate 102 can be removed via a variety of methods, for example via one or more of laser lift-off operations, etching operations and/or back-grinding operations (e.g., chemical-mechanical planarization).

[00027] Figure 1 E shows fabrication of thin film transistors (TFTs) 114 (only one called out) from a back surface side 108b. Thus, the TFTs 114 can be formed over, or on, the LEDs 106. Such fabrication will typically include various semiconductor fabrication operations including the depositing of a second semiconductor material 114a, depositing of dielectric, and etching. Advantageously, the second semiconductor 114a material may have different physical and/or operational characteristics from the first semiconductor material 104. Thus, a semiconductor material 104 having physical or operational characteristics particularly suited to fabrication of LEDs or generation of specific wavelengths of light may be employed in fabrication of the LEDs 106, while a semiconductor material 114a having physical or operational characteristics particularly suited to fabrication of TFTs or TFT switching operation may be employed in fabrication of the TFTs 114.

[00028] Figure 1 F shows the chiplets 110 being transferred to a target or final substrate 116 and mounted or attached thereto. As illustrated in Figure 1 F, pick and place machinery, for example a transfer head 118, or an elastomeric stamp may be employed to retrieve the chiplets 110 from the temporary carrier or intermediate substrate 112 and transfer the chiplets 110 to the target or final substrate 116. [00029] Figure 1 G shows depositing and patterning fabrication operations on the target or final substrate 116 to provide interconnects 120 to the drive circuitry. Such may include various silicon fabrication operations including depositing of electrically conductive materials, depositing of dielectric material, and patterning (e.g., masking, etching). While not illustrated in Figures 1A-1 G, fabrication can further include addition of color conversion material and/or formation of light extraction features.

[00030] Figures 2A-2G show a sequence of operations to fabricate an electronic device according to at least one illustrated implementation, which employs a temporary carrier substrate to invert chiplets with LEDs allowing formation of transistor circuitry from a back surface side thereof before transfer to a final substrate via selective laser release in the inverted orientation. In the implementation of Figure 2A-2G, an LED epiwafer is processed to create individual chiplets. The LED wafer is structured into chiplets, and processed to incorporate thin film transistors. The chiplets are transferred to a temporary carrier or intermediate substrate, and released from a growth substrate of the epiwafer. TFT circuitry is deposited and structured on the chiplets. The chiplets are then transferred to a target or final substrate and electrically connected to circuitry. This can optionally be followed by the deposition of one or more color conversion layers and/or light extraction features to improve the extraction of light from the LEDs.

[00031] Many of the structures and operations are similar, or even identical, to those illustrated and described with reference to Figures 1A-1 G. These similar or identical structures and operations are identified below using the same reference numbers as used in Figures 1A-1 G.

[00032] In particular, Figure 2A shows a light emitting diode (LED) wafer 100 comprising a growth substrate 102 and a first semiconductor material in the form of an epitaxial LED layer 104, carried by the growth substrate 102. The epitaxial LED layer 104 has a front surface 104a, a back surface 104b opposed from the front surface 104a across a thickness t of the epitaxial LED layer 104. The back surface 104b is at least proximally more adjacent the growth substrate 102 relative to the front surface 104a.

[00033] Figure 2B shows fabrication of a plurality of a first type of semiconductor based electronic device in the first semiconductor material, illustrated as light emitting diodes 106 (only one called out). The LEDs 106 comprise a light generation or recombination region 106a of the epitaxial LED layer 104, and contacts 106b. The contacts 106b may be fabricated by depositing electrically conductive material, and patterning the electrically conductive material. Notably, the LEDs 106 are fabricated from a front surface side 108a. As also illustrated in Figure 2B the LEDs 106 are structured into chiplets 110a, 110b (only two called out, collectively110).

[00034] Figure 2C shows the resulting structure (e.g., chiplets 110 coupled to growth substrate 102) inverted, with the LEDs 106 bonded to a temporary carrier or intermediary substrate 112. The contacts 106b may be proximally adjacent the temporary carrier or intermediary substrate 112.

[00035] Figure 2D shows removal of the growth substrate 102 to expose the back surface 104b of the LEDs 106 for further processing from a back surface side 108b. The growth substrate 102 can be removed via a variety of methods, for example via one or more of laser lift-off operations, etching operations and/or back-grinding operations (e.g., chemical-mechanical planarization).

[00036] Figure 2E shows fabrication of thin film transistors (TFTs) 114 (only one called out) from a back surface side 108b. The TFTs 114 can be formed over, or on, the LEDs 106. Such fabrication will typically include various semiconductor fabrication operations including the depositing of a second semiconductor material 114a, depositing of dielectric, and etching. Advantageously, the second semiconductor 114a material may have different physical and/or operational characteristics from the first semiconductor material 104. Thus, a semiconductor material 104 having physical or operational characteristics particularly suited to fabrication of LEDs or generation of specific wavelengths of light may be employed in fabrication of the LEDs 106, while a semiconductor material 114a having physical or operational characteristics particularly suited to fabrication of TFTs or TFT switching operation may be employed in fabrication of the TFTs 114.

[00037] Figure 2F shows the chiplets 110 being transferred to a target or final substrate 116 and mounted or attached thereto. As illustrated in Figure 1 F, a laser release operation may be employed to release the chiplets 110 from the temporary carrier or intermediate substrate 112 and transfer the chiplets 110 to the target or final substrate

116. [00038] Figure 2G shows depositing and patterning fabrication operations on the target or final substrate 116 to provide interconnects 120 to the drive circuitry. Such may include various silicon fabrication operations including depositing of electrically conductive materials, depositing of dielectric material, and patterning (e.gr., masking, etching, polishing). While not illustrated in Figures 1A-1 G, fabrication can further include addition of color conversion material and/or formation of light extraction features.

[00039] Figures 3A-3D show a sequence of operations to fabricate an electronic device according to at least one illustrated implementation, in which transistor circuitry is formed from a front surface side over LEDs before direct transfer, without a temporary carrier or intermediate substrate, to a final substrate in an inverted orientation In the implementation of Figures 3A-3D, an LED epiwafer is processed to create individual chiplets. TFT circuitry is deposited and structured on the chiplets. The chiplets are then individually transferred to a target or final substrate and electrically connected. The transfer is conducted without the use of a temporary carrier or intermediate substrate. This can optionally be followed by a deposition of one or more color conversion layers and/or fabrication of one or more light extraction features to improve the extraction of light from the LEDs.

[00040] Many of the structures and operations are similar, or even identical, to those illustrated and described with reference to Figures 1A-1 G. These similar or identical structures and operations are identified below using the same reference numbers as used in Figures 2A-2G.

[00041] In particular, Figure 3A shows a light emitting diode (LED) wafer 100 comprising a growth substrate 102 and a first semiconductor material in the form of an epitaxial LED layer 104, carried by the growth substrate 102. The epitaxial LED layer 104 has a front surface 104a, a back surface 140b opposed from the front surface 104a across a thickness t of the epitaxial LED layer 104. The back surface 104b is at least proximally more adjacent the growth substrate 102 relative to the front surface 104a.

[00042] Figure 3B shows fabrication of a plurality of a first type of semiconductor based electronic device in the first semiconductor material, illustrated as light emitting diodes 106 (only one called out). The LEDs 106 comprise a light generation or recombination region 106a of the epitaxial LED layer 104, and contacts 106b. The contacts 106b may be fabricated by depositing electrically conductive material, and patterning the electrically conductive material. Notably, the LEDs 106 are fabricated from a front surface side 108a.

[00043] Figure 3B also shows fabrication of thin film transistors (TFTs) 114 (only one called out) from the front surface side 108a (in contrast to the implementations of Figures 1A-1 G and 2A-2G where the TFTs are fabricated from the back surface side 108b). The TFTs 114 can be formed over, or on, the LEDs 106. Such fabrication will typically include various semiconductor fabrication operations including the depositing of a second semiconductor material 114a, depositing of dielectric, and etching. Advantageously, the second semiconductor 114a material may have different physical and/or operational characteristics from the first semiconductor material 104. Thus, a semiconductor material 104 having physical or operational characteristics particularly suited to fabrication of LEDs or generation of specific wavelengths of light may be employed in fabrication of the LEDs 106, while a semiconductor material 114a having physical or operational characteristics particularly suited to fabrication of TFTs or TFT switching operation may be employed in fabrication of the TFTs 114.

[00044] As also illustrated in Figure 3B the LEDs 106 with the TFTs 114 are structured into chiplets 110a, 110b (only two called out, collectivelyl 10).

[00045] Figure 3C shows the resulting structure (e.g., chiplets 110 coupled to growth substrate 102) inverted, with the LEDs 106 and TFTs 114 bonded to a target or final substrate 116 in the inverted orientation (e.g., the TFTs 114 more proximally adjacent the target or final substrate 112 than the LEDs 106). The chiplets 110 may, for example, be transferred to the target or final substrate 116 and mounted or attached thereto via a structured laser processing release operation which releases the chiplets 110 from the growth substrate 102 and to transfer the chiplets 110 to the target or final substrate 1 16.

[00046] Figure 3D shows depositing and patterning fabrication operations on the target or final substrate 116 to provide interconnects 120 to the drive circuitry. Such may include various silicon fabrication operations including depositing of electrically conductive materials, depositing of dielectric material, and patterning (e.g., masking, etching, polishing). While not illustrated in Figures 3A-3d, fabrication can further include addition of color conversion material and/or formation of light extraction features. [00047] Figures 4A-4H show a sequence of operations to fabricate an electronic device according to at least one illustrated implementation, in which transistor circuitry is formed from a front surface side over LEDs along with solder bumps before direct transfer, without a temporary carrier or intermediate substrate, to a final substrate in an inverted orientation, followed by a solder reflow operation and addition of color conversion material. Many of the structures and operations are similar, or even identical, to those illustrated and described with reference to Figures 1A-1 G. These similar or identical structures and operations are identified below using the same reference numbers as used in Figures 1A-1 G.

[00048] In particular, Figure 4A shows a light emitting diode (LED) wafer 400 comprising a growth substrate 102. The LED wafer 400 has a front surface 102a.

[00049] Figure 4B shows fabrication of a plurality of a first type of semiconductor based electronic device in a first semiconductor material, illustrated as light emitting diodes 106 (only one called out), with electrodes 407 and mesas 409. Where a first set of electronic components will be LEDs, the first semiconductor material may, for example, take the form of an epitaxial LED layer carried by the growth substrate 102. The LEDs 106 comprise a light generation or recombination region 106a (Figure 4C) of the epitaxial LED layer 104 (Figure 4C), and contacts 106b (Figure 4C). The electrodes 106b may be fabricated by depositing electrically conductive material, and patterning the electrically conductive material. Notably, the LEDs 106 are fabricated from a front surface side 108a.

[00050] Figure 4C shows fabrication of thin film transistors (TFTs) 114 (only one called out) from the front surface side 108a. The TFTs 114 can be formed over, or on, the LEDs 106. Such fabrication will typically include various semiconductor fabrication operations including the depositing of a second semiconductor material 114a, depositing of dielectric, and etching. Advantageously, the second semiconductor 114a material may have different physical and/or operational characteristics from the first semiconductor material 104. Thus, a semiconductor material 104 having physical or operational characteristics particularly suited to fabrication of LEDs or generation of specific wavelengths of light may be employed in fabrication of the LEDs 106, while a semiconductor material 114a having physical or operational characteristics particularly suited to fabrication of TFTs or TFT switching operation may be employed in fabrication of the TFTs 114. As noted, the first semiconductor material is not limited to semiconductors suitable for formation of LEDs, and first set of electronic devices are not limited to LEDs. In other implementations, the first semiconductor material may be particularly suitable for fabrication of semiconductor based lasers, photo-detection, or high speed switching, and the first set of electronic devices may be semiconductor lasers, photodetectors, or high speed switches (e.g., high speed transistors), respectively.

[0005] ] Figure 4D shows fabrication of interconnects 422 and addition of solder bumps 424 from the front surface side 108a. As also illustrated in Figure 4D, the LEDs 106, TFTs 114, interconnects 422, and solder bumps 424 are structured into chiplets 410a, 410b (only two called out, collectively 410).

[00052] Figure 4E shows the resulting structure (e.g., chiplets 410 on growth substrate 102) inverted and positioned proximate a target or final substrate 116. The resulting structure may have the interconnects positioned more proximally adjacent the target or final substrate 116 than the LEDs 106.

[00053] Figure 4F shows the chiplets 410 being transferred to a target or final substrate 116 and mounted or attached thereto. As illustrated in Figure 4F, a laser release operation may be employed to release the chiplets 410 from growth substrate 102, without the use of any temporary carrier or intermediate substrates, and transfer the chiplets 410 directly to the target or final substrate 116.

[00054] Figure 4G shows a solder reflow operation, in which a temperature is raised to cause solder reflow. The solder bumps 424 may thus reflow to establish electrically communicative coupling between the chiplets 410 and electrically conductive pads or traces on the target or final substrate 116.

[00055] Figure 4H shows the addition of one or more color conversion materials 426. For example, one or more layers of color conversion material 426 may be deposited, and optionally patterned on the target or final substrate 116. The depositing or patterning may cause portions of the color conversion material 426 to be in registration with respective ones of the LEDs 106. While not illustrated, the fabrication process can include the formation of one or more light extraction features, which may include registration of light extraction features with respective ones of the LEDs 106. [00056] Figures 5A-5G show a sequence of operations to fabricate an electronic device according to at least one illustrated implementation, in which transistor circuitry is formed from a front surface side over LEDs before direct transfer, without a temporary carrier or intermediate substrate, to a final substrate in an un-inverted orientation via release of tethered chiplets. Many of the structures and operations are similar, or even identical, to those illustrated and described with reference to Figures 4A-4H. These similar or identical structures and operations are identified below using the same reference numbers as used in Figures 4A-4H.

[00057] In particular, Figure 5A shows a light emitting diode (LED) wafer 400 comprising a growth substrate 102. The LED wafer 400 has a front surface 100a.

[00058] Figure 5B shows fabrication of a plurality of a first type of semiconductor based electronic device in a first semiconductor material, illustrated as light emitting diodes 106 (only one called out), with electrodes and optionally mesas. Where a first set of electronic components will be LEDs, the first semiconductor material may, for example, take the form of an epitaxial LED layer carried by the growth substrate 102. The LEDs 106 comprise a light generation or recombination region 106a (Figure 5C) of the epitaxial LED layer 104 (Figure 5C), and electrodes 106b (Figure 5C). The electrodes 106b may be fabricated by depositing electrically conductive material, and patterning the electrically conductive material. Notably, the LEDs 106 are fabricated from a front surface side 108a.

[00059] Figure 5C shows fabrication of thin film transistors (TFTs) 114 (only one called out) from the front surface side 108a. The TFTs 114 can be formed over, or on, the LEDs 106. Such fabrication will typically include various semiconductor fabrication operations including the depositing of a second semiconductor material 114a, depositing of dielectric, and etching. Advantageously, the second semiconductor 114a material may have different physical and/or operational characteristics from the first semiconductor material 104. Thus, a semiconductor material 104 having physical or operational characteristics particularly suited to fabrication of LEDs or generation of specific wavelengths of light may be employed in fabrication of the LEDs 106, while a semiconductor material 114a having physical or operational characteristics particularly suited to fabrication of TFTs or TFT switching operation may be employed in fabrication of the TFTs 114. As noted, the first semiconductor material is not limited to semiconductors suitable for formation of LEDs, and first set of electronic devices are not limited to LEDs. In other implementations, the first semiconductor material may be particularly suitable for fabrication of semiconductor based lasers, photo-detection, or high speed switching, and the first set of electronic devices may be semiconductor lasers, photodetectors, or high speed switches (e.g., high speed transistors), respectively.

[00060] Figure 5D shows a partial releasing of the resulting structure (e.g. , chiplets 110) from the growth substrate 102. The chiplets may be partially undercut, for instance via etching, and optionally masking prior to the etching. A tether 526 is left for each chiplet 110, leaving the chiplets 110 partially attached to the growth substrate 102.

[00061] Figure 5E shows the chiplets 110 being completely released from the growth substrate by dissolving (e.g., etching) or otherwise severing (e.g., laser) the tethers 526

[00062] Figure 5F shows the completely released chiplets 110 transferred to a target or final substrate 116 and mounted or attached thereto.

[00063] Figure 5H shows the formation of interconnects 120 on the target or final substrate 116. Formation of interconnects 120 may comprise various depositing and patterning fabrication operations on the target or final substrate 116 to provide interconnects 120 to the drive circuitry. Such may include various silicon fabrication operations including depositing of electrically conductive materials, depositing of dielectric material, and patterning (e.g., masking, etching, polishing).

[00064] While not illustrated, one or more color conversion materials may be added. For example, one or more layers of color conversion material may be deposited, and optionally patterned on the target or final substrate 116. The depositing or patterning may cause portions of the color conversion material to be in registration with respective ones of the LEDs 106. While also not illustrated, the fabrication process can include the formation of one or more light extraction features, which may include registration of light extraction features with respective ones of the LEDs 106.

[00065] Figures 6A-6I show a sequence of operations to fabricate an electronic device according to at least one illustrated implementation, in which transistor circuitry is formed from a front surface side over LEDs before direct transfer, without a temporary carrier or intermediate substrate, to a final substrate in an inverted orientation via release of tethered chiplets. Many of the structures and operations are similar, or even identical, to those illustrated and described with reference to Figures 4A-4H and 5A-5G. These similar or identical structures and operations are identified below using the same reference numbers as used in Figures 4A-4H and 5A-5G.

[00066] In particular, Figure 6A shows a light emitting diode (LED) wafer 400 comprising a growth substrate 102. The LED wafer 400 has a front surface 100a.

[00067] Figure 6B shows fabrication of a plurality of a first type of semiconductor based electronic device in a first semiconductor material, illustrated as light emitting diodes 106 (only one called out), with electrodes 106b and optionally mesas (not shown). Where a first set of electronic components will be LEDs, the first semiconductor material may, for example, take the form of an epitaxial LED layer carried by the growth substrate 102. The LEDs 106 comprise a light generation or recombination region 106a (Figure 6C) of the epitaxial LED layer 104 (Figure 6C), and electrodes 106b (Figure 6C). The electrodes 106b may be fabricated by depositing electrically conductive material, and patterning the electrically conductive material. Notably, the LEDs 106 are fabricated from a front surface side 108a.

[00068] Figure 6C shows fabrication of thin film transistors (TFTs) 114 (only one called out) from the front surface side 108a. The TFTs 114 can be formed over, or on, the LEDs 106. Such fabrication will typically include various semiconductor fabrication operations including the depositing of a second semiconductor material 114a, depositing of dielectric, and etching. Advantageously, the second semiconductor 114a material may have different physical and/or operational characteristics from the first semiconductor material 104. Thus, a semiconductor material 104 having physical or operational characteristics particularly suited to fabrication of LEDs or generation of specific wavelengths of light may be employed in fabrication of the LEDs 106, while a semiconductor material 114a having physical or operational characteristics particularly suited to fabrication of TFTs or TFT switching operation may be employed in fabrication of the TFTs 114. As noted, the first semiconductor material is not limited to semiconductors suitable for formation of LEDs, and first set of electronic devices are not limited to LEDs. In other implementations, the first semiconductor material may be particularly suitable for fabrication of semiconductor based lasers, photo-detection, or high speed switching, and the first set of electronic devices may be semiconductor lasers, photodetectors, photovoltaic cells, or high speed switches (e.g., high speed transistors), respectively.

[00069] Figure 6D shows fabrication of contacts and connections, for example by patterning (e.g., masking and etching) and the addition of solder bumps 424 from the front surface side 108a. The LEDs 106, TFTs 114, and solder bumps 424 are structured into chiplets 410a, 410b (only two called out, collectively 410).

[00070] Figure 6E shows partial released chiplets 110 tethered to the growth substrate 102 being attached to a target or final substrate 116. As previously described, the chiplets may be partially undercut, for instance via etching, and optionally masking prior to the etching. A tether 526 is left for each chiplet 110, leaving the chiplets 110 partially attached to the growth substrate 102.

[00071] Figure 6F shows the completion of interconnects 120 on the target or final substrate 116. Completion of interconnects 120 may comprise various depositing and patterning fabrication operations on the target or final substrate 116 to provide interconnects 120 to the drive circuitry. Such may include various silicon fabrication operations including depositing of electrically conductive materials, depositing of dielectric material, and patterning (e.g., masking, etching, polishing).

[00072] Figure 6G shows the chiplets 110 being completely released from the growth substrate by dissolving (e.g., etching) or otherwise severing (e.g., laser) the tethers 526

[00073] Figure 6H shows the completely released chiplets 110 transferred to a target or final substrate 116 and mounted or attached thereto.

[00074] Figure 6I shows a portion of the final substrate 116 after dividing, along with a respective one of the chiplets 110 mounted or attached thereto.

[00075] While not illustrated, one or more color conversion materials may be added. For example, one or more layers of color conversion material may be deposited, and optionally patterned on the target or final substrate 116. The depositing or patterning may cause portions of the color conversion material to be in registration with respective ones of the LEDs 106. While also not illustrated, the fabrication process can include the formation of one or more light extraction features, which may include registration of light extraction features with respective ones of the LEDs 106. [00076] In any of the implementations, the physical and/or operational characteristics of a first semiconductor material may be suitable, or particularly suitable or even optimized to fabricate a particular type of semiconductor based electronic device. For example, such semiconductor based electronic devices include, but are not limited to, optoelectronic devices (e.g., semiconductor-based lasers, LEDs, photodetectors, photovoltaic or solar cells), high electron mobility transistors (e.g.,. HEMTs), piezoelectric devices (e.g., GaN surface acoustic wave (SAW) devices), or integrated circuits for logic and power handling.

[00077] The second semiconductor material may in some instances be the same type of semiconductor material as the first semiconductor material. However, in any of the implementations, the physical and/or operational characteristics of a second semiconductor material may be suitable, or particularly suitable or even optimized to fabricate a particular type of semiconductor based electronic device. For example, such semiconductor based electronic devices include, but are not limited to, thin film transistors, and the second semiconductor material can be any of a variety of materials suitable for fabricating TFTs, including silicon (e.g., amorphous Si, low temperature polysilicon, high temperature polysilicon, nanocrystalline silicon), germanium, metal oxides (e.g., ZnO, ZTO, IGZO, etc.), sulfides, chalcogenides, or other materials suitable for fabrication of TFTs. The second semiconductor material may in some instances be a recrystallized silicon. The semiconductor-based devices fabricated from the second semiconductor can have any of wide range of possible functionalities available using thin film devices including, but not limited to, transistors, light emitting devices, photovoltaic devices, and photodetectors.

[00078] Other combinations of device inversion, individual release, transfer to temporary structures en masse, sorting, and quality control can also be considered as options for the various fabrication processes. The deposition of color conversion layers, patterning to improve extraction or etendue, and the deposition of materials to enhance the extraction efficiency can be conducted at various operations in the various fabrication processes. The introduction of layers to facilitate the release of individual or mass layers can also be incorporated at a number of operation in the various fabrication processes. In any of the described various fabrication processes, one or more acts or operations may be omitted, and/or other acts or operations added In at least some of the implementations, one or more acts or operations may be performed in a different order than presented.

[00079] Complete, unpattemed layer transfer can occur through a number of techniques, including, but not limited to, eutectic bonding, wafer bonding, use of temporary or permanent adhesives, use of solder or bump bonding, laser liftoff, plasma fusion, Smart Cut-style wafer release, etc.

[00080] Individual chiplet transfer can occur through a variety of techniques including, but not limited to, use of an electrostatic chuck, use of a MEMS grip head, use of elastomeric stamps, or the use of selective laser transfer processes.

[00081] Electrical connection or electrical coupling can be executed in a number of ways, including the use of solder bumps, deposited metal, indium bonding, the use of anisotropic conducting films (ACF), direct metal eutectic bonding, and fusion bonding.

[00082] U.S. provisional patent application Serial No. 62/676,172, filed May 24, 2018; U.S. provisional patent application Serial No. 62/787,505, filed January 2, 2019; U.S. provisional patent application Serial No. 62/783,714, filed December 21 , 2018; are hereby incorporated by reference, in their entireties.

[00083] The various embodiments described above can be combined to provide further embodiments. These and other changes can be made to the embodiments in light of the above-detailed description. All of the commonly assigned US patent application publications, US patent applications, foreign patents, and foreign patent applications referred to in this specification and/or listed in the Application Data Sheet, including but not limited to US Provisional Patent Application No. 62/789,397, filed January 7, 2019, entitled“PROCESSES, ARTICLES AND APPARATUS THAT INCORPORATE SEMICONDUCTOR SWITCHES AND DRIVE CIRCUITRY ON COMPOUND SEMICONDUCTOR CHIPLETS ^* are incorporated herein by reference in their entirety. In general, in the following claims, the terms used should not be construed to limit the claims to the specific embodiments disclosed in the specification and the claims, but should be construed to include all possible embodiments along with the full scope of equivalents to which such claims are entitled. Accordingly, the claims are not limited by the disclosure.