PROCESSES FOR FABRICATING CONDUCTIVE PATTERNS USING NANOLITHOGRAPHY AS A PATTERNING TOOL

Title:

PROCESSES FOR FABRICATING CONDUCTIVE PATTERNS USING NANOLITHOGRAPHY AS A PATTERNING TOOL

Document Type and Number:

WIPO Patent Application WO2005037418

Kind Code:

A3

Abstract:

Nanolithographic deposition of metallic nanostructures using coated tips for use in microelectronics, catalysis, and diagnostics. AFM tips can be coated with metallic precursors and the precursors patterned on substrates. The patterned precursors can be converted to the metallic state with application of heat. High resolution and excellent alignment can be achieved.

Inventors:

CROCKER PERCY VANDORN JR (US)
DEMERS LINETTE (US)
AMRO NABIL A (US)
ELGHANIAN ROBERT (US)

Application Number:

PCT/US2004/027631

Publication Date:

March 23, 2006

Filing Date:

August 26, 2004

Export Citation:

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Assignee:

NANOINK INC (US)
CROCKER PERCY VANDORN JR (US)
DEMERS LINETTE (US)
AMRO NABIL A (US)
ELGHANIAN ROBERT (US)

International Classes:

B05D5/12; C23C18/08; C23C18/16; C23C18/28; G01Q70/00; H01L21/288; H01L21/44; H01L21/768; H05K3/10; H05K3/12; B01J; G01Q60/00; G01Q80/00; (IPC1-7): H01L21/44; B32B3/00; B32B27/14; B05D1/36; B05D5/12

Foreign References:

US20030162004A1	2003-08-28
US6146716A	2000-11-14

Other References: