Title:
A PROCESSING APPARATUS FOR PROCESSING DEVICES, PARTICULARLY DEVICES INCLUDING ORGANIC MATERIALS THEREIN, AND METHOD FOR TRANSFERRING AN EVAPORATION SOURCE FROM A PROCESSING VACUUM CHAMBER TO A MAINTENANCE VACUUM CHAMBER OR FROM THE MAINTENANCE VACUUM CHAMBER TO THE PROCESSING VACUUM CHAMBER
Document Type and Number:
WIPO Patent Application WO/2015/086168
Kind Code:
A8
Abstract:
A processing apparatus for processing devices, particularly devices including organic materials therein, is described. The processing apparatus includes a processing vacuum chamber; at least one evaporation source for organic material, wherein the at least one evaporation source includes at least one evaporation crucible, wherein the at least one evaporation crucible is configured to evaporate the organic material, and at least one distribution pipe with one or more outlets, wherein the at least one distribution pipe is in fluid communication with the at least one evaporation crucible; and a maintenance vacuum chamber connected with the processing vacuum chamber, wherein the at least one evaporation source can be transferred from the processing vacuum chamber to the maintenance vacuum chamber and from the maintenance vacuum chamber to the processing vacuum chamber.
Inventors:
DIEGUEZ-CAMPO JOSE MANUEL (DE)
BANGERT STEFAN (DE)
SCHÜSSLER UWE (DE)
HAAS DIETER (US)
BANGERT STEFAN (DE)
SCHÜSSLER UWE (DE)
HAAS DIETER (US)
Application Number:
PCT/EP2014/067673
Publication Date:
June 09, 2016
Filing Date:
August 19, 2014
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
DIEGUEZ-CAMPO JOSE MANUEL (DE)
BANGERT STEFAN (DE)
SCHÜSSLER UWE (DE)
HAAS DIETER (US)
DIEGUEZ-CAMPO JOSE MANUEL (DE)
BANGERT STEFAN (DE)
SCHÜSSLER UWE (DE)
HAAS DIETER (US)
International Classes:
C23C14/04; B05D1/00; B05D1/02; B05D3/04; C23C14/12; C23C14/24; C23C14/56; C23C16/44; H01L51/00; H01L51/56
Attorney, Agent or Firm:
ZIMMERMANN & PARTNER (München, DE)
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