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Title:
PROCESSING CUP UNIT AND SUBSTRATE PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/095582
Kind Code:
A1
Abstract:
This processing cup unit is disposed so as to surround a substrate being held in a horizontal position when the substrate is subjected to a process using a processing liquid. The processing cup unit is provided with a lower cup, an upper cup, and a mist attachment-preventing member. The upper cup is disposed so as to surround the substrate. The lower cup is located under the upper cup. The mist attachment-preventing member is disposed under the substrate. The mist attachment-preventing member prevents a mist of the processing liquid from attaching to the underside of the substrate.

Inventors:
SUGIYAMA MINORU (JP)
Application Number:
PCT/JP2019/038971
Publication Date:
May 14, 2020
Filing Date:
October 02, 2019
Export Citation:
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Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/304; B05C11/08; H01L21/027
Domestic Patent References:
WO2017082065A12017-05-18
Foreign References:
JP2014086639A2014-05-12
JP2018056223A2018-04-05
JPH0945611A1997-02-14
JP2017103368A2017-06-08
Attorney, Agent or Firm:
NAKAGAWA, Masahiro et al. (JP)
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