Title:
PROCESSING DEVICE FOR METAL MATERIAL
Document Type and Number:
WIPO Patent Application WO/2016/024586
Kind Code:
A1
Abstract:
Provided is a processing device for a metal material, the device comprising: an airtight container that holds a sample therewithin; an oxygen pump that extracts oxygen molecules from a gas discharged from the airtight container; a circulation means that returns the gas to the airtight container; and a plasma generation means that converts the gas returned from the circulation means into plasma and irradiates the sample with the same.
Inventors:
SHIRAKAWA NAOKI (JP)
MURATA KAZUHIRO (JP)
MURATA KAZUHIRO (JP)
Application Number:
PCT/JP2015/072754
Publication Date:
February 18, 2016
Filing Date:
August 11, 2015
Export Citation:
Assignee:
NAT INST OF ADVANCED IND SCIEN (JP)
SIJTECHNOLOGY INC (JP)
SIJTECHNOLOGY INC (JP)
International Classes:
B22F3/10; B22F1/00; H01L21/288; B22F1/107; H01B13/00
Foreign References:
| JP2011047003A | 2011-03-10 | |||
| JP2004250283A | 2004-09-09 |
Other References:
See also references of EP 3189915A4
Attorney, Agent or Firm:
IIDA, Toshizo et al. (JP)
Toshizo Iida (JP)
Toshizo Iida (JP)
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