Title:
PROCESSING DEVICE AND METHOD OF MAINTAINING THE DEVICE
Document Type and Number:
WIPO Patent Application WO/2003/067353
Kind Code:
A1
Abstract:
A film processing device using vaporized liquid source capable of confirming the flow control accuracy of flow control equipment such as a mass flow controller (15) controlling the flow of the liquid source without separating the flow control equipment from piping and disassembling the piping, comprising a bypass passage (41) for bypassing a part of a washing fluid feed passage (32) for feeding washing fluid to a liquid source feed passage (12) and a flowmeter such as an MFM (42), wherein the washing fluid is allowed to flow to the mass flow controller (15) through the MFM (42), and the flow of the washing fluid detected by the MFM (42) is compared with a target flow set in the mass flow controller (15) to check whether the mass flow controller (15) operates normally or not.
Inventors:
Toriya, Daisuke c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Homma, Kenji c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Tsukada, Akihiko c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Shimomura, Kouji c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Homma, Kenji c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Tsukada, Akihiko c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Shimomura, Kouji c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Application Number:
PCT/JP2003/001337
Publication Date:
August 14, 2003
Filing Date:
February 07, 2003
Export Citation:
Assignee:
TOKYO ELECTRON LIMITED (3-6 Akasaka 5-chome, Minato-ku, Tokyo, 107-8481, JP)
Toriya, Daisuke c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Homma, Kenji c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Tsukada, Akihiko c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Shimomura, Kouji c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Toriya, Daisuke c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Homma, Kenji c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Tsukada, Akihiko c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Shimomura, Kouji c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
International Classes:
G01F1/00; C23C16/44; C23C16/448; G01F25/00; G05D7/06; H01L21/304; H01L21/31; G01F1/00; C23C16/44; C23C16/448; G01F25/00; G05D7/06; H01L21/02; (IPC1-7): G05D7/06; C23C16/455; G01F1/00; H01L21/31
Attorney, Agent or Firm:
Yoshitake, Kenji (Kyowa Patent & Law Office, Room 323 Fuji Bldg., 2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo, 100-0005, JP)
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