Title:
PROCESSING DEVICE AND PROCESSED OBJECT MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/013146
Kind Code:
A1
Abstract:
The present invention enables accommodating diced workpieces in a tubular container while eliminating use of a moving mechanism for moving a processing table and comprises: a processing table which holds a workpiece; a first holding mechanism which holds the workpiece so as to convey the same to the processing table; a processing mechanism which cuts the workpiece being held on the processing table into diced pieces; a transfer table on which workpieces obtained by the dicing by the processing mechanism is transferred; a second holding mechanism which holds the diced workpieces so as to convey the same from the processing table to the transfer table; a conveying movement mechanism that extends along the array direction of the processing table and the transfer table and has a common transfer shaft for moving the first holding mechanism and the second holding mechanism; a processing movement mechanism which moves the processing mechanism on a horizontal plane in a first direction that runs along the transfer shaft and in a second direction perpendicular to the first direction; a container installation part which has installed therein a tubular container that accommodate the diced workpieces from an opening at one end thereof; and a conveying accommodation mechanism which conveys the diced workpieces from the transfer table to the tubular container installed in the container installation part so as to have said diced workpieces accommodated in the tubular container.
Inventors:
KANAMARU HIROYUKI (JP)
FUKAI MOTOKI (JP)
YAMAMOTO YUKO (JP)
FUKAI MOTOKI (JP)
YAMAMOTO YUKO (JP)
Application Number:
PCT/JP2022/013026
Publication Date:
February 09, 2023
Filing Date:
March 22, 2022
Export Citation:
Assignee:
TOWA CORP (JP)
International Classes:
B24B27/00; B24B41/06; B24B49/12; H01L21/301; H01L21/68; H01L21/683
Domestic Patent References:
| WO2009113236A1 | 2009-09-17 |
Foreign References:
| JP2007536727A | 2007-12-13 | |||
| JPS5382261A | 1978-07-20 | |||
| JP2013116532A | 2013-06-13 | |||
| JPS6469039A | 1989-03-15 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei et al. (JP)
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