Title:
PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/088631
Kind Code:
A1
Abstract:
Provided is a processing device with excellent cooling performance. The processing device is equipped with: a substrate support section capable of supporting a substrate; a cooling section for cooling the substrate support section; and a rotating section for rotating the cooling section together with the substrate support section. The cooling section has a shaft member that is connected to a movable section that moves during the cooling operation and a vibration-proof section that is connected to the shaft member, and the vibration-proof section includes an elastic body and weights that are provided on the elastic body.
Inventors:
MIYAUCHI TAKUMA (JP)
ISHIDA MASAAKI (JP)
FUJIMOTO YU (JP)
ITASAKA SUGURU (JP)
ISHIDA MASAAKI (JP)
FUJIMOTO YU (JP)
ITASAKA SUGURU (JP)
Application Number:
PCT/JP2012/007103
Publication Date:
June 20, 2013
Filing Date:
November 06, 2012
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
International Classes:
C23C14/50; C23C14/34; F25B9/14; H01L21/3065; H01L21/683
Domestic Patent References:
| WO2011043063A1 | 2011-04-14 |
Foreign References:
| JP2009281614A | 2009-12-03 | |||
| JP2006336034A | 2006-12-14 | |||
| JP2004308863A | 2004-11-04 | |||
| JP2011149100A | 2011-08-04 | |||
| JPH04353361A | 1992-12-08 |
Attorney, Agent or Firm:
OHTSUKA, Yasunori et al. (JP)
Yasunari Otsuka (JP)
Yasunari Otsuka (JP)
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Claims: