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Patent Searching and Data


Title:
PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/054280
Kind Code:
A1
Abstract:
This processing device is provided with: a rotatable chuck (23) that holds a processing tool (24); a chuck plate (1) that holds an object to be processed (W); rotors (4, 5, 6, 12, 13) to which the chuck plate (1) is attached and which have a driven-side magnet (13) for magnetic coupling; a hydrostatic gas bearing (2) that rotatably supports the rotors (4, 5, 6, 12, 13); an inclination adjustment means that adjusts the orientation of the hydrostatic gas bearing (2); a motor (18); and transmission means (14, 17) that transmit rotational driving force of the motor (18) to the driving-side magnet (16) for magnetic coupling.

Inventors:
SAWAGUCHI, Kazuya (3577 Ohaza Yoshiwara, Ami-machi, Inashiki-gu, Ibaraki 95, 〒3001195, JP)
OKUDA, Manabu (3577 Ohaza Yoshiwara, Ami-machi, Inashiki-gu, Ibaraki 95, 〒3001195, JP)
Application Number:
JP2018/033112
Publication Date:
March 21, 2019
Filing Date:
September 06, 2018
Export Citation:
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Assignee:
CANON SEMICONDUCTOR EQUIPMENT INC. (3577, Ohaza Yoshiwara Ami-machi, Inashiki-gu, Ibaraki 95, 〒3001195, JP)
International Classes:
B24B41/06; B24B7/04; B24B41/047; F16C32/06; F16H49/00; H01L21/304
Foreign References:
JP2010188433A2010-09-02
JP2009095913A2009-05-07
JP2009195994A2009-09-03
JP2008264913A2008-11-06
JP2013038952A2013-02-21
JP2013013216A2013-01-17
JPH08229759A1996-09-10
JP2016504549A2016-02-12
Attorney, Agent or Firm:
CHIKASHIMA,Kazuo et al. (6F SANKI Shiba Kanasugibashi Building, 4-3 Shiba 1-chome, Minato-k, Tokyo 14, 〒1050014, JP)
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