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Patent Searching and Data


Title:
PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/159735
Kind Code:
A1
Abstract:
A processing device for processing a substrate, said processing device having: a substrate holding unit for holding a substrate; a processing unit for processing a processing surface of a substrate held in the substrate holding unit; and a display unit for displaying a schematic view of the substrate, and for displaying, in association with the schematic view, processing information obtained during processing of the substrate. The display unit has a condition input screen for inputting processing conditions, and the processing conditions input via the condition input screen are displayed in association with the schematic view.

Inventors:
FUKUNAGA, Nobutaka (1-1 Fukuhara, Koshi Cit, Kumamoto 16, 〒8611116, JP)
YARIMITSU, Masakazu (1-1 Fukuhara, Koshi Cit, Kumamoto 16, 〒8611116, JP)
SUZUKI, Akifumi (1-1 Fukuhara, Koshi Cit, Kumamoto 16, 〒8611116, JP)
KATAOKA, Mitsushi (1-1 Fukuhara, Koshi Cit, Kumamoto 16, 〒8611116, JP)
Application Number:
JP2019/003814
Publication Date:
August 22, 2019
Filing Date:
February 04, 2019
Export Citation:
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Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku Tokyo, 25, 〒1076325, JP)
International Classes:
G05B19/409; B24B49/04; H01L21/304
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (Akebono International, Kakubari Building 1-20, Sumiyoshi-cho, Shinjuku-k, Tokyo 65, 〒1620065, JP)
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