PROCESSING DEVICE

WIPO Patent Application WO/2022/185684

A1

The present invention allows for simplification of device structure and reduction in footprint, and comprises: a work table 2A, 2B for holding a sealed substrate W; a first holding mechanism 3 for holding the sealed substrate W in order to transport the sealed substrate W to the work table 2A, 2B; a processing mechanism 4 for processing the sealed substrate W held by the work table 2A, 2B; a transfer table 5 to which a plurality of products P are transferred; a second holding mechanism 6 for holding the plurality of products P in order to transport the plurality of products P from the work table 2A, 2B to the transfer table 5; a transportation movement mechanism 7 that extends in the direction along which the work table 2A, 2B and transfer table 5 are arranged, and has a common transfer shaft 71 for moving the first holding mechanism 3 and second holding mechanism 6; and a processing movement mechanism 8 that moves, in a horizontal plane, the processing mechanism 4 in each of a X direction along the transfer shaft 71 and a Y direction intersecting with the X direction.

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WO/2020/088066	HIGHLY EFFICIENT DEVICE FOR WASHING AND DRYING NEEDLE ROLLER

FUKAI MOTOKI (JP)
HORI SATOKO (JP)
SAKAUE YUYA (JP)
YAMAMOTO YUKO (JP)
YOSHIOKA SHO (JP)
KATAOKA SHOICHI (JP)

PCT/JP2021/047824

September 09, 2022

December 23, 2021

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TOWA CORP (JP)

B08B3/02; B23Q7/04; B26D1/18; B26D7/18; H01L21/301; H01L21/677

JP2013058623A	2013-03-28
JP2007134551A	2007-05-31
KR20070042336A	2007-04-23
JP2016083717A	2016-05-19
JP2019012782A	2019-01-24
JP2009096087A	2009-05-07
JP2010125488A	2010-06-10
KR20060027602A	2006-03-28
JP2015088558A	2015-05-07

NISHIMURA, Ryuhei (JP)

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