Title:
PROCESSING FLUID DISCHARGE DEVICE, EVALUATION DEVICE, PROCESSING FLUID DISCHARGE METHOD, AND EVALUATION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/216310
Kind Code:
A1
Abstract:
A processing fluid discharge device (1) comprises: a determination unit (12) that determines the closing speed of an opening/closing valve (72), which opens and closes a processing fluid supply passage supplying a processing fluid to a nozzle (251); and an imaging unit (65) that, when the opening/closing valve (72) has closed the processing fluid supply passage and discharge of the processing fluid from the nozzle (251) has stopped, images a passage of a tip end section of the nozzle (251) and a processing fluid discharge path extending forward from the tip end of the nozzle (251) along the discharge direction of the processing fluid, said imaging being performed from a different direction than the discharge direction, wherein the determination unit (12) determines the classification of the closing speed of the opening/closing valve (72), said classification being whether the closing speed of the opening/closing valve (72) is appropriate, or is slower or faster than the appropriate speed, by performing a prescribed determination process on the basis of an image of the passage of the tip end section of the nozzle (251) and the discharge path, said image being within a source image in which the imaging unit (65) imaged the passage of the tip end section of the nozzle (251) and the discharge path.
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Inventors:
INOUE MASAFUMI (JP)
Application Number:
PCT/JP2019/018246
Publication Date:
November 14, 2019
Filing Date:
May 07, 2019
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/304; H01L21/027
Foreign References:
| JPH11176734A | 1999-07-02 | |||
| JP2016178238A | 2016-10-06 | |||
| JP2016192550A | 2016-11-10 | |||
| JP2016134566A | 2016-07-25 | |||
| JP2000082646A | 2000-03-21 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
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