Title:
PROCESSING MACHINE, PROCESSING SYSTEM, AND METHOD FOR MANUFACTURING PROCESSED OBJECT
Document Type and Number:
WIPO Patent Application WO/2022/024916
Kind Code:
A1
Abstract:
In a processing machine 1, an X-axis control unit 33X performs feedback control of the X-directional position of an X-axis table 9X in every control cycle Tc. A Z-axis control unit 33Z acquires, in every control cycle Tc, the latest detection value of the Z-directional position of a Z-axis table 9Z, calculates a second deviation on the basis of the difference between the acquired detection value and a target position, and controls a Z-axis drive source 23Z such that the second deviation is reduced. The Z-axis control unit 33Z acquires, in every control cycle Tc, the latest detection value of a first error which is a displacement of the X-axis table 9 in the Z direction, and increases or reduces the second deviation on the basis of the detection value of the first error such that at least a part of the error in the Z-directional relative position between a workpiece 103 and a tool 101 caused by the first error is cancelled by a movement of the Z-axis table 9Z in the Z direction.
Inventors:
AKIYAMA TAKANOBU (JP)
FUKUTA MASAHIKO (JP)
GAKUHARI KATSUJI (JP)
FUKUTA MASAHIKO (JP)
GAKUHARI KATSUJI (JP)
Application Number:
PCT/JP2021/027295
Publication Date:
February 03, 2022
Filing Date:
July 21, 2021
Export Citation:
Assignee:
SHIBAURA MACHINE CO LTD (JP)
International Classes:
G05B19/18; B23Q15/12; B23Q17/22; G05B19/404
Foreign References:
| JP2015109079A | 2015-06-11 | |||
| JP2015109023A | 2015-06-11 | |||
| JP2007086953A | 2007-04-05 | |||
| JP2005128914A | 2005-05-19 |
Attorney, Agent or Firm:
IIJIMA, Yasuhiro (JP)
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