Title:
PROCESSING OPTICAL SYSTEM, PROCESSING DEVICE, AND PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/218580
Kind Code:
A1
Abstract:
[Problem] To provide a processing optical system, a processing device, and a processing method that can form an ideally shaped riblet structure. [Solution] A processing optical system (15) comprises: a first optical system (16) that split a processing light EL0 from a light source (2) into a first processing light EL1 and a second processing light EL2; a second optical system (17) that forms a interference fringe IS on a surface of an object (W) by dividing the second processing light EL2 into a plurality of second processing lights EL2 and irradiating the divided plurality of second processing lights EL2 onto the object (W) from different incident directions; and a third optical system (18) that irradiates the first processing light EL1 from the first optical system (16) toward an interference area IA on the surface of the object (W) where an interference fringe IS has been formed.
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Inventors:
YANAGI TSUYOSHI (JP)
Application Number:
PCT/JP2022/019995
Publication Date:
November 16, 2023
Filing Date:
May 11, 2022
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B23K26/359; B23K26/064; B23K26/067; B23K26/364
Domestic Patent References:
| WO2019082309A1 | 2019-05-02 |
Foreign References:
| US20160265570A1 | 2016-09-15 | |||
| JP2021509864A | 2021-04-08 | |||
| EP2431120A1 | 2012-03-21 | |||
| JP2020518458A | 2020-06-25 |
Attorney, Agent or Firm:
CREO LAW & INTELLECTUAL PROPERTY (JP)
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