Title:
PROCESSING RECIPE GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/198143
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a technology with which it is possible to generate a processing recipe automatically from an inspection image, even when the inspection image varies due to the influence of image capture conditions of a processing device. A processing recipe generation device of the present invention generates a converted image in which a component depending on an image capture condition of an inspection image is reduced, and generates a processing recipe using a target image that has been generated using the same conversion condition as for the converted image (see Fig. 2).
Inventors:
ISHIKAWA MASAYOSHI (JP)
OHMORI TAKESHI (JP)
NAKADA HYAKKA (JP)
OHMORI TAKESHI (JP)
NAKADA HYAKKA (JP)
Application Number:
PCT/JP2018/015042
Publication Date:
October 17, 2019
Filing Date:
April 10, 2018
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
H01L21/02
Foreign References:
| JP2013518449A | 2013-05-20 | |||
| JP2008513997A | 2008-05-01 | |||
| JP2017162456A | 2017-09-14 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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