Title:
PROCESSING SYSTEM, MEASUREMENT PROBE, SHAPE MEASURING DEVICE, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2019/130379
Kind Code:
A1
Abstract:
This processing system is equipped with: a machine tool which includes a measurement part that outputs measurement information for calculating the shape of a workpiece; a control unit which generates position information pertaining to the position of the measurement part when measuring the workpiece, and outputs the generated position information and a generation timing signal indicating the timing at which the position information was generated; an acquisition unit which acquires the output position information and generation timing signal; an estimation unit which, on the basis of the timing at which the acquisition unit acquired the generation timing signal, estimates the timing at which the position information was generated; and a shape calculation unit which calculates the shape of the workpiece on the basis of the measurement information, the position information, and the timing estimated by the estimation unit.
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Inventors:
YAMADA TOMOAKI (JP)
Application Number:
PCT/JP2017/046349
Publication Date:
July 04, 2019
Filing Date:
December 25, 2017
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B23Q17/20; G01B21/00
Foreign References:
| JP2010194660A | 2010-09-09 | |||
| JP2017173160A | 2017-09-28 | |||
| JP2008157646A | 2008-07-10 | |||
| JP2012225701A | 2012-11-15 |
Other References:
See also references of EP 3733346A4
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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