Title:
PROCESSING SYSTEM, PROCESSING METHOD AND RECORDING MEDIUM
Document Type and Number:
WIPO Patent Application WO/2008/059799
Kind Code:
A1
Abstract:
A processing system (1) is provided with a processing container (30) which stores
a processing object (W) in a processing space (83); a processing fluid generating
section (41) for generating a processing fluid at a prescribed temperature;
and a main channel (56) arranged between the processing fluid generating section
(41) and the processing container (30), for guiding the processing fluid supplied
from the processing fluid generating section (41).In the downstream of the main
channel (56), a processing fluid supply channel (171) is arranged for guiding
the processing fluid into the processing container (30) through a switch valve
(70) and supplying the processing fluid into the processing space (83) in the
processing container (30). In the downstream of the main channel (56), a processing
fluid bypass channel (172) is arranged for guiding the processing fluid, which
is not guided to the processing fluid supply channel (171), to bypass the processing
space (83) through the switch valve (70). On the main channel (56), a flow volume
adjusting mechanism (65) for adjusting the flow volume of the processing fluid
flowing in the main channel (56) is arranged.
More Like This:
| JP2011143516 | MACHINING DEVICE |
| JP2008073825 | CMP CONDITIONER AND ITS MANUFACTURING METHOD |
| JP2003017452 | METHOD AND APPARATUS FOR TREATING SUBSTRATE |
Inventors:
AMANO, Yoshifumi (1-1 Fukuhara,Koshi-sh, Kumamoto 16, 8611116, JP)
Application Number:
JP2007/071935
Publication Date:
May 22, 2008
Filing Date:
November 12, 2007
Export Citation:
Assignee:
TOKYO ELECTRON LIMITED (3-6 Akasaka 5-chome, Minato-ku Tokyo, 81, 1078481, JP)
東京エレクトロン株式会社 (〒81 東京都港区赤坂五丁目３番６号 Tokyo, 1078481, JP)
東京エレクトロン株式会社 (〒81 東京都港区赤坂五丁目３番６号 Tokyo, 1078481, JP)
International Classes:
H01L21/304; B08B3/04; H01L21/027
Attorney, Agent or Firm:
YOSHITAKE, Kenji et al. (Kyowa Patent & Law Office, Room 323 Fuji Bldg., 2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo 05, 1000005, JP)
Download PDF: