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Patent Searching and Data


Title:
PROCESSING SYSTEM AND PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/150480
Kind Code:
A1
Abstract:
The processing system is equipped with a support device capable of supporting an object to be processed, a processing device that irradiates an energy beam to a region to be processed on the object to be processed, supplies a material to the region irradiated by the energy beam, and performs additional processing, and a repositioning device for changing the positional relationship of the energy beam irradiation region from the support device and the processing device. Additional processing is performed on a first region, which is part of the support device, and/or a second region, which is part of the object to be processed, to form a reference modeled object, and the processing device and/or the repositioning device is controlled using information relating to the reference modeled object.

Inventors:
KAWAI, Hidemi (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
Application Number:
JP2018/003190
Publication Date:
August 08, 2019
Filing Date:
January 31, 2018
Export Citation:
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Assignee:
NIKON CORPORATION (15-3, Konan 2-chome Minato-k, Tokyo 90, 〒1086290, JP)
International Classes:
B29C64/268; B22F3/105; B22F3/16; B23K26/342; B29C64/153; B33Y10/00; B33Y30/00
Domestic Patent References:
WO2016173668A12016-11-03
WO2015141032A12015-09-24
Foreign References:
US9205691B12015-12-08
JP2002210835A2002-07-31
JP2003535712A2003-12-02
JP2000326416A2000-11-28
JP2018001725A2018-01-11
JP2015196249A2015-11-09
Attorney, Agent or Firm:
EGAMI, Tatsuo (3rd Floor Oak Building Kyobashi, 16-10, Kyobashi 1-chome, Chuou-k, Tokyo 31, 〒1040031, JP)
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