Title:
PROCESSING SYSTEM AND PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/150480
Kind Code:
A1
Abstract:
The processing system is equipped with a support device capable of supporting an object to be processed, a processing device that irradiates an energy beam to a region to be processed on the object to be processed, supplies a material to the region irradiated by the energy beam, and performs additional processing, and a repositioning device for changing the positional relationship of the energy beam irradiation region from the support device and the processing device. Additional processing is performed on a first region, which is part of the support device, and/or a second region, which is part of the object to be processed, to form a reference modeled object, and the processing device and/or the repositioning device is controlled using information relating to the reference modeled object.
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Inventors:
KAWAI HIDEMI (JP)
Application Number:
PCT/JP2018/003190
Publication Date:
August 08, 2019
Filing Date:
January 31, 2018
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B29C64/268; B22F3/105; B22F3/16; B23K26/342; B29C64/153; B33Y10/00; B33Y30/00
Domestic Patent References:
WO2016173668A1 | 2016-11-03 | |||
WO2015141032A1 | 2015-09-24 |
Foreign References:
US9205691B1 | 2015-12-08 | |||
JP2002210835A | 2002-07-31 | |||
JP2003535712A | 2003-12-02 | |||
JP2000326416A | 2000-11-28 | |||
JP2018001725A | 2018-01-11 | |||
JP2015196249A | 2015-11-09 |
Attorney, Agent or Firm:
EGAMI, Tatsuo (JP)
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